High-temperature low-friction CrAlSiON nanometer composite coating and preparation method thereof

A nano-composite coating, low friction technology, applied in coating, metal material coating process, ion implantation plating and other directions, can solve the problems that are not conducive to the widespread use of coatings, increase equipment and process costs, and high friction coefficient , to improve the anti-friction and wear performance and thermal stability, reduce the coefficient of friction, and improve the bonding force of the coating

Inactive Publication Date: 2016-12-07
GUANGDONG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Excessive vacuum will inevitably increase equipment and process costs, which is not conducive to the widespread use of coatings
The traditional hard coating has a high coefficien

Method used

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  • High-temperature low-friction CrAlSiON nanometer composite coating and preparation method thereof
  • High-temperature low-friction CrAlSiON nanometer composite coating and preparation method thereof
  • High-temperature low-friction CrAlSiON nanometer composite coating and preparation method thereof

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] A high-temperature and low-friction CrAlSiON nanocomposite coating is composed of a CrN transition layer and a CrAlSiON functional layer. The atomic percent content of each element in the CrN transition layer is: Cr: 75at.%, N: 25at.%. The atomic percent content of each element in the CrAlSiON functional layer is: Al: 20at.%, Cr: 10at.%, Si: 12at.%, O: 5at.%, N: 53at.%.

[0027] Polish the cemented carbide, ultrasonically clean it with acetone and alcohol for 10 minutes, dry it with nitrogen, and put it into a vacuum chamber. Turn on the heater to raise the temperature to 300°C, and evacuate the vacuum chamber to a vacuum degree of 1.0×10 -3 Below Pa. 300 sccm of Ar gas was introduced, the bias voltage of the workpiece support was set to -1000V, and the surface of the substrate was cleaned by sputtering, and the bombardment time was 10 minutes. Afterwards, the bias voltage was reduced to -600V, the Cr target was ignited, the target current was 150A, and the substrate...

Embodiment 2

[0031] A high-temperature and low-friction CrAlSiON nanocomposite coating is composed of a CrN transition layer and a CrAlSiON functional layer. The atomic percentage content of each element in the CrN transition layer is: Cr: 70at.%, N: 30at.%. The atomic percent content of each element in the CrAlSiON functional layer is: Al: 25at.%, Cr: 15at.%, Si: 10at.%, O: 15at.%, N: 35at.%.

[0032] Polish the cemented carbide, ultrasonically clean it with acetone and alcohol for 15 minutes, then dry it with nitrogen and put it into a vacuum chamber. Turn on the heater to raise the temperature to 350°C, and evacuate the vacuum chamber to a vacuum degree of 5.0×10 -3 Below Pa. Introduce 250 sccm of Ar gas, set the bias voltage of the workpiece support to -800V, and perform sputter cleaning on the surface of the substrate, and the bombardment time is 20 minutes. Afterwards, the bias voltage was reduced to -800V, the Cr target was ignited, the target current was 120A, and the substrate w...

Embodiment 3

[0035] A high-temperature and low-friction CrAlSiON nanocomposite coating is composed of a CrN transition layer and a CrAlSiON functional layer. The atomic percentage content of each element in the CrN transition layer is: Cr: 60at.%, N: 40at.%. The atomic percent content of each element in the CrAlSiON functional layer is: Al: 30at.%, Cr: 20at.%, Si: 5at.%, O: 30at.%, N: 25at.%. Polish the cemented carbide, ultrasonically clean it with acetone and alcohol for 15 minutes, then dry it with nitrogen and put it into a vacuum chamber. Turn on the heater to raise the temperature to 400°C, and evacuate the vacuum chamber to a vacuum degree of 5.0×10 -3 Below Pa. 300 sccm of Ar gas was introduced, the bias voltage of the workpiece support was set at -900V, and the surface of the substrate was cleaned by sputtering, and the bombardment time was 15 minutes. Afterwards, the bias voltage was reduced to -700V, the Cr target was ignited, the target current was 100A, and the substrate was...

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Abstract

The invention discloses a high-temperature low-friction CrAlSiON nanometer composite coating which comprises a CrN transition layer and a CrAlSiON functional layer. The coating with different components can be obtained by adopting a multi-arc ion plating technique through changing technological parameters. According to a preparation method of the coating, oxygen element is introduced into the CrAlSiON nanometer composite coating, and the existence form of oxygen in the coating is controlled by changing depositional conditions, so that one or more oxides being low in friction coefficient and resistant to abrasion can be preformed in the coating; accordingly, while the binding force of the coating is improved and the stress is reduced, the friction coefficient of the coating under the high-temperature condition can be lowered, as well as the friction resistance, the abrasion resistance and the thermal stability of the coating can be improved; and the coating is more suitable for a severer application environment.

Description

technical field [0001] The invention relates to the field of material coatings, in particular to a high-temperature and low-friction CrAlSiON nanocomposite coating and a preparation method thereof. Background technique [0002] In recent years, the method of coating metal nitrides on tools, molds, mechanical parts and other products to improve the surface properties and service life of products has become a widely used surface modification technology. Coating preparation techniques mainly include chemical vapor deposition (CVD) and physical vapor deposition (PVD). However, CVD technology has a series of problems such as reactive gas will corrode equipment and environmental pollution. (PVD) technology has been developed rapidly. With the advancement of PVD technology, hard coatings have experienced the first generation of simple binary coatings (TiN, TiC) → the second generation of ternary or quaternary solid solution coatings (TiAlN, TiCN, TiAlCN, etc.) → the third generati...

Claims

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Application Information

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IPC IPC(8): C23C14/32C23C14/06C23C14/02
CPCC23C14/325C23C14/022C23C14/024C23C14/0641C23C14/0676
Inventor 王启民耿东森黎海旭代伟王成勇
Owner GUANGDONG UNIV OF TECH
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