Laser holography-based method for processing graphene metal composite surface Raman-enhanced base

A surface Raman enhancement, metal composite technology, applied in optics, optical components, instruments, etc., can solve the problems of high equipment cost, difficult control, long production time, etc., to achieve simple production process, easy accurate control, easy to batch. production effect

Active Publication Date: 2017-01-11
苏州六三二八光电科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Molecular self-assembly method, it is difficult to produce large-area periodically arranged surface Raman-enhanced substrates
The preparation of surface Raman-enhanced substrate by alumina template preparation method is complex and difficult to control
Enhanced activity and poor periodicity of surface Raman-enhanced substrates fabricated by noble metal sol preparation method
The equipment cost of the electron beam exposure preparation method is high, the production time is long, and it is impossible to complete a large-area periodic microstructure substrate

Method used

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  • Laser holography-based method for processing graphene metal composite surface Raman-enhanced base
  • Laser holography-based method for processing graphene metal composite surface Raman-enhanced base
  • Laser holography-based method for processing graphene metal composite surface Raman-enhanced base

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Embodiment 1

[0035] Embodiment 1: A kind of Raman-enhanced substrate processing method based on laser holographic graphene metal composite surface, such as figure 1 As shown, including the following production steps:

[0036] 1) The step of growing a graphene film layer on the grating substrate 5; using the method of chemical vapor deposition, by optimizing the growth conditions, growing a graphene layer 14 with a thickness of 5 nm to 20 nm on the surface of the clean glass-ceramic grating substrate;

[0037] 2) Spin-coat photoresist film: Clean the grating substrate with a dust-free cloth and organic solvent, start the vacuum equipment of the coater to vacuum before coating, control the rotation speed of the coater, and the photoresist film 15 coating thickness 500nm ~ 600nm;

[0038] Baking hardening film: Put the grating substrate coated with photoresist film into a clean oven at room temperature, heat it quickly and steadily to about 90°C, stay at this temperature for 1 hour, and fina...

Embodiment 2

[0044] Embodiment 2: A kind of Raman-enhanced substrate processing method based on laser holographic graphene metal composite surface, such as figure 1 As shown, including the following production steps:

[0045] 1) The step of growing a graphene film layer on the grating substrate 5; using the method of chemical vapor deposition, by optimizing the growth conditions, growing a graphene layer 14 with a thickness of 10nm on the surface of the clean glass-ceramic grating substrate;

[0046] 2) Spin-coat photoresist film: Clean the grating substrate with a dust-free cloth and organic solvent, start the vacuum equipment of the coater to vacuum before coating, control the rotation speed of the coater, and the photoresist film 15 coating thickness 550nm;

[0047] Baking hardening film: Put the grating substrate coated with photoresist film into a clean oven at room temperature, heat it quickly and steadily to about 90°C, stay at this temperature for 1 hour, and finally lower the ove...

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Abstract

The present invention discloses a laser holography-based method for processing a graphene metal composite surface Raman-enhanced base. According to the method, a graphene film layer is grown on a grating substrate, and the graphene film layer is coated with a photoresist; a surface Raman-enhanced base is fabricated through using an orthogonal holographic interference photolithography scheme according to the periodic distribution of light interference fringes and the controllability of the shape of the fringes; orthogonal interference fringes are recorded on a photoresist thin film, a surface embossment type photoresist grating can be formed through real-time development; the grating structure is transferred onto graphene through ion beam etching; and a surface-enhanced Raman scattering metal active layer is plated on the photoresist grating through using a film plating device, and the graphene metal composite structure surface Raman-enhanced base can be obtained. With the method adopted, the problem of difficult processing and fabrication of the graphene metal composite surface Raman-enhanced base can be solved.

Description

technical field [0001] The invention relates to the field of optical processing, in particular to a preparation method of a Raman spectrum enhanced optical element. Background technique [0002] Raman spectroscopy is the "fingerprint" spectrum of material molecules, which can be used to effectively reflect the structural feature information of the molecules to be measured. However, the research found that the signal intensity obtained by observation after scattering is very weak, and the detection signal is often submerged. In noise, this shortcoming once limited its application in practical detection and analysis. After roughening the surface of a smooth silver electrode in 1974, Fleischmann et al. first obtained a high-quality Raman spectrum of a monolayer of pyridine molecules adsorbed on the surface of a silver electrode. Subsequently, Van Duyne and his collaborators found through systematic experiments and calculations that the Raman scattering signal of each pyridine ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/02
CPCG02B5/0268
Inventor 邹文龙邹颖
Owner 苏州六三二八光电科技有限公司
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