Super-hydrophobic microstructure and manufacturing method thereof
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A super-hydrophobic micro-structure technology, applied in the field of materials, can solve problems such as not reaching the super-hydrophobic standard
Inactive Publication Date: 2017-06-09
SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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[0006] Although the above two methods make the DLC film have a certain degree of hydrophobicity (cont
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Embodiment 1
[0039] 1) Hydrophilic treatment of silicon substrate
[0040] (1) Cut the silicon wafer into 10mm*20mm size.
[0041] (2) The conditions of organic cleaning are: acetone ultrasonic cleaning for 5-15 minutes, absolute ethanol ultrasonic cleaning for 5-15 minutes, and deionized water ultrasonic cleaning for 5-15 minutes.
[0042] (3) Concentrated sulfuric acid and hydrogen peroxide were mixed in a volume ratio of 3:1, heated continuously at 85°C for 60 minutes, and finally rinsed with deionized water.
[0043] 2) Using a gas-liquid interface assembly method to complete the self-assembly of a polystyrene ball with a diameter of 2000 nm on the silicon surface to form a single-layer polystyrene ball mask.
[0044] 3) Using inductively coupled plasma to etch the colloidal crystal grain mask. The etching conditions are: SF 6 The flow rate is 60sccm, O 2 The flow rate is 5sccm, C 4 F 8 The flow rate is 80sccm, the ICP power is 800W, the RF power is 35W, the etching temperature is 10°C, the cha...
Embodiment 2
[0050] 1) Hydrophilic treatment of silicon substrate
[0051] (1) Cut the silicon wafer into 20mm*20mm size.
[0052] (2) The conditions of organic cleaning are: acetone ultrasonic cleaning for 5-15 minutes, absolute ethanol ultrasonic cleaning for 5-15 minutes, and deionized water ultrasonic cleaning for 5-15 minutes.
[0053] (3) Concentrated sulfuric acid and hydrogen peroxide were mixed in a volume ratio of 3:1, heated continuously at 85°C for 60 minutes, and finally rinsed with deionized water.
[0054] 2) The self-assembly of polystyrene balls with a diameter of 500 nm on the silicon surface is completed by the natural sedimentation method to form a single-layer polystyrene ball mask.
[0055] 3) Using BOSCH process in inductively coupled plasma etching to etch the colloidal crystal grain mask. The etching conditions are: SF 6 The flow rate is 150sccm, O 2 The flow rate is 30sccm, the time is 6s; the passivation condition is: C 4 F 8 The flow rate is 50sccm, the time is 5s, the I...
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Abstract
The invention discloses a super-hydrophobic microstructure and a manufacturing method thereof. The method comprises: using colloid crystalline grains as an etching mask film, using a colloid crystalline grain etching technology to form nanoscale or micron grade microstructures on the surface of a silicon wafer; using ICP-PECVD to deposit fluorine-doped diamond film on the microstructures. The thickness of the diamond film is 1-100 nm, and mass proportion of fluorine in the diamond film is 1-50%. The colloid crystalline grain etching technology is used, and expensive optical equipment is not needed. Colloid crystalline grains in different grain diameters are used as the etching mask film, and micron and nano meter microstructures in different feature sizes are obtained. The ICP-PECVD is helpful to improve density of reactive plasma in a cavity and increase density of the fluorine-doped DLC film, so as to improve quality of the formed film. The ICP-PECVD can realize to deposit films at room temperature, and the DLC film can be formed on an organic polymer substrate which is not resistant to high temperature, and the DLC film has hydrophobic property.
Description
Technical field [0001] The invention belongs to the technical field of materials, and particularly relates to a superhydrophobic microstructure and a preparation method thereof. Background technique [0002] In 1977, German botanists Barthlott and Neinhuis discovered the lotus effect. When the micron epidermal cells and nano biowax material on the surface of the lotus leaf make the water droplets on the surface of the lotus leaf, the surface of the lotus leaf and the water droplets have a fixed water contact angle of 150° and a water droplet rolling angle of 10°. The surface of the lotus leaf has super-hydrophobic properties and self-cleaning function. [0003] Based on the water-repellent and self-cleaning effect of lotus leaf, the super-hydrophobic / super-oleophobic surface based on bionics has become a current research hotspot. When preparing super-hydrophobic / super-oleophobic surfaces, firstly, there must be a low surface energy component to reduce the free energy of the mater...
Claims
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