Far infrared wave band optical film optical filter with CVD diamond being a substrate
An optical film and filter technology, applied in the direction of filters, optics, optical components, etc., can solve the problems of inability to spectral response, difficulty in research and analysis of long-wave channels, and achieve the effect of stable performance
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[0018] The specific embodiment of the present invention will be described in further detail below in conjunction with the accompanying drawings.
[0019] The invention is a far-infrared band optical thin film filter based on CVD diamond, the band pass range is 5-45 μm, the cut-off zone is 0-5 μm, and PbTe and ZnSe are selected as high and low refractive index materials.
[0020] The band-pass film system on the front side and the cut-off film system on the back side of the far-infrared band optical thin film filter based on CVD diamond in the present invention adopt a multi-layer irregular film system structure. The deposition of the film system adopts the complementary monitoring method of quartz crystal monitoring and direct optical monitoring to control the deposition error of the film thickness and obtain a result close to the design.
[0021] The front bandpass film system 1 selects the central wavelength λ 0 5μm, optimized by film design software, the film structure is:...
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