A variable pitch capacitive acceleration sensor and its preparation method

An acceleration sensor, capacitive technology, used in the measurement of acceleration, velocity/acceleration/shock measurement, piezoelectric/electrostrictive/magnetostrictive devices, etc., can solve the problems of easy wear and tear of mechanical devices, frequent maintenance, and high prices , to achieve the effect of simple manufacturing process, good mechanical properties of the device, and reduced size and cost

Inactive Publication Date: 2019-06-04
常州迅鱼电子技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

As we all know, although accelerometers using machining can also measure acceleration, these mechanical devices are easy to wear due to moving parts, and have the disadvantages of large size, high price, and frequent maintenance.

Method used

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  • A variable pitch capacitive acceleration sensor and its preparation method
  • A variable pitch capacitive acceleration sensor and its preparation method
  • A variable pitch capacitive acceleration sensor and its preparation method

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Embodiment 1

[0031] Such as Figure 1 to Figure 3 As shown, the variable pitch capacitive acceleration sensor provided by the present invention is prepared through the following steps:

[0032] a. Using P-type single crystal silicon as the substrate 1, etching 1-10 μm shallow grooves on the single crystal silicon substrate 1 through an anisotropic reactive ion etching process;

[0033] b. While protecting the sidewall of the shallow groove of the single crystal silicon substrate, the single crystal silicon substrate 1 is isotropically etched to prepare for the subsequent epitaxial single crystal silicon cavity sealing process;

[0034] c. Epitaxial growth of single crystal silicon, forming a sealed cavity inside the single crystal silicon substrate, the cavity height is about 5 μm;

[0035] d. Smooth the surface of the single crystal silicon substrate by chemical mechanical polishing (CMP) to prepare for the next photolithography and ion implantation;

[0036] e. Phosphorus ion implantat...

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Abstract

The invention discloses a spacing-variable capacitive accelerometer and a preparation method thereof, especially a spacing-variable capacitive accelerometer based on MEMS micromachining technologies. Under the effect of an applied acceleration, change of a gap between an inertia mass block and a detection electrode causes change of an equivalent capacitance, and the acceleration is measured. The accelerometer and the preparation method thereof are compatible with an integrated circuit technology, a signal processing circuit can be integrated, the sensitivity is higher, and influence of the environment is less. Ions are implanted into different positions of a silicon substrate to form a PN node, the unipolar conductivity of the PN node is utilized, substrate electrical isolation between moving and static teeth of a sensitive capacitance structure of the accelerometer is realized, bidirectional conductivity is prevented, the manufacturing technology is simple, the cost is reduced, and the stability is high.

Description

technical field [0001] The invention relates to a variable-pitch capacitive acceleration sensor and a preparation method thereof, in particular to a variable-pitch capacitive acceleration sensor based on MEMS micromachining technology and a preparation method thereof, belonging to the technical field of micro-electromechanical systems. Background technique [0002] Acceleration is an important parameter that reflects the external environment of the system and its own situation, and has an important impact on environmental monitoring and the state identification of the system itself. Therefore, it is of great practical significance to quickly and accurately measure the acceleration. As we all know, although accelerometers using machining can also measure acceleration, these mechanical devices are easy to wear due to moving parts, and have the disadvantages of large size, high price, and need for frequent maintenance. Micro inertial sensors based on MEMS (micro-electro-mechani...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P15/125B81B7/02B81C1/00
CPCB81B7/02B81C1/00047B81C1/00055B81C1/0038B81C1/00539B81C2201/0133B81C2201/0181G01P15/125
Inventor 蔡春华李予宸谈俊燕齐本胜华迪
Owner 常州迅鱼电子技术有限公司
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