Coating crucible with sealing side and manufacture method of coating crucible
Patent Information
- Authority / Receiving Office
- CN Β· China
- Current Assignee / Owner
- SHANGHAI QI JIE CARBON MATERIALS
- Publication Date
- 2018-04-27
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Abstract
Description
technical field
[0001] The invention relates to the application of a carbon fiber composite material in the manufacturing process of monocrystalline silicon or polycrystalline silicon, in particular to a coating crucible with edge sealing made by weaving carbon fiber composite material and a processing and manufacturing method of the crucible. Background technique
[0002] In the manufacture of single crystal silicon or polycrystalline silicon, the Czochralski method (CZ method) is commonly used at present, which is a method of pulling a single crystal from a melt along a vertical direction. In manufacturing equipment, one component is the graphite crucible, which is used to hold the quartz crucible inside. During use, due to the different expansion coefficients of the quartz crucible and the graphite crucible, and the corrosion reaction between silicon vapor and graphite, there are problems such as cracking of the graphite crucible and loss of strength due to erosion. More...