Polysilicon Full Melting Ingot Casting Technology and Its Crucible
A technology of polysilicon and crucible, which is applied in the direction of polycrystalline material growth, crystal growth, single crystal growth, etc., can solve the problems of reducing the average lifetime of few carriers, affecting polysilicon ingots, polysilicon defects, etc., and achieves few defects, high yield, and production high efficiency effect
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Embodiment 1
[0055] Embodiment 1 prepares the raw material of polysilicon ingot
[0056] The raw material for preparing polysilicon ingots is a mixture of primary polysilicon and polysilicon ingot recycling materials. Polysilicon ingot recycling materials include fragments generated during polysilicon ingot casting, polysilicon ingot heads, polysilicon ingot tails, purified silicon blocks and scraps . Table 1 shows the compositions of silicon materials 1# to 3#, comparative silicon materials D1# and comparative silicon materials D2# used in the polysilicon ingot in this embodiment.
[0057] Table 1
[0058]
Embodiment 2
[0059] Example 2 Ingot Crucible and Silicon Material Arrangement Rules
[0060] Put silicon materials 1#-3# in Example 1, comparative silicon materials D1#, D2# into quartz crucibles 1#-3# respectively, and compare crucibles D1#, D2# for polysilicon ingot casting. The filling rules of the silicon material in the quartz crucible are as follows: spread the high-purity crystal seeds on the bottom of the quartz crucible, then put a layer of reduced polysilicon, place a large piece of recycled material in the center, place the reduced polysilicon in the gaps and upper part of the surrounding area, and place the recycled silicon material in the quartz crucible. The middle of the crucible is not in contact with the quartz crucible. The specific parameters of the crucible are shown in Table 2. Taking crucible 1# as an example to illustrate the roughness of the crucible is as follows: figure 1 shown.
[0061] Table 2
[0062]
Embodiment 3
[0063] Embodiment 3 polysilicon ingot casting process
[0064] Put the silica crucible filled with silicon material in Example 2 into a polysilicon ingot furnace for polysilicon ingot casting. Put silicon material 1#-3#, comparative silicon material D1# and comparative silicon material D2# in Example 1 into crucibles 1#-3#, comparative crucible D1#, and comparative crucible D2# respectively to make ingots 1-3#, ingot D1# and ingot D2#.
[0065] Put the crucible containing the silicon material in Example 2 into a polysilicon ingot furnace for polysilicon ingot casting. The polysilicon ingot casting furnace includes an evacuation system, a heating system, a temperature measurement system, an insulation layer lifting system, and a pressure control system. Taking ingot 1# as an example to illustrate the polysilicon ingot casting process, the polysilicon ingot casting includes the following steps:
[0066] 1) Charging stage: Fill the silicon material into the crucible, and trans...
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