Rapid assessment method of cleanness of large-area graphene
A graphene, large-area technology, applied in the field of materials, can solve the problems of limited evaluation area, long evaluation period, and high cost, and achieve the effects of convenient operation, low cost, and rapid characterization of large surfaces.
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Embodiment 1
[0030] Embodiment 1, utilize the method for fumigation of titanium tetrachloride to evaluate the cleanliness of the ultra-clean graphene assisted preparation of foam copper
[0031] (1) Use dilute hydrochloric acid and deionized water with a mass fraction of 5% to clean the copper foil in sequence (produced by Alfa Aesar, with a purity of 99.8%, and a thickness of 25 μm), and the copper foil and the foamed copper are in close contact (specifically, the foamed copper is placed on the copper foil) Above the foil, the distance between them is 0.01 ~ 1mm, such as figure 1 shown) is placed in a casing with a magnetic control device, and then the casing is placed in a tube furnace. Under a hydrogen atmosphere with a flow rate of 100sccm and a system pressure of 100Pa, the temperature of the furnace body is raised to 1020°C and kept 30min;
[0032] (2) Keep the temperature of the furnace body at 1020° C., change the flow rate of hydrogen into hydrogen gas of 11 sccm, and feed in met...
Embodiment 2
[0039] Embodiment 2, utilize the method for fumigation of titanium tetrachloride to evaluate the cleanliness of the graphene prepared by common CVD process
[0040](1) Using a phosphoric acid and ethylene glycol solution with a volume ratio of 3:1 as the electrolyte, copper foil (produced by Alfa Aesar, with a purity of 99.8%, and a thickness of 25 μm) was connected to the positive electrode, and polished at a DC current of 0.5 A for 30 min. Put the copper foil in a casing with a magnetic control device, then put the casing in a tube furnace, and raise the temperature of the furnace body to 1000°C under a hydrogen atmosphere with a flow rate of 300 sccm, and keep the system pressure at 300 Pa. 50min.
[0041] (2) Keep the temperature of the furnace body at 900°C, 950°C or 1040°C, change the flow rate of hydrogen gas into 500 sccm of hydrogen gas, and feed into methane gas with a flow rate of 1 sccm, the system pressure is about 500 Pa, and keep for 8 hours.
[0042] (3) Use a...
Embodiment 3
[0048] Embodiment 3, utilize the method for fumigation of titanium tetrachloride to evaluate the cleanliness of the graphene prepared by common CVD process
[0049] (1) Using a phosphoric acid and ethylene glycol solution with a volume ratio of 3:1 as the electrolyte, copper foil (produced by Alfa Aesar, with a purity of 99.8%, and a thickness of 25 μm) was connected to the positive electrode, and polished at a DC current of 0.5 A for 30 min. Put the copper foil in a casing with a magnetic control device, then put the casing in a tube furnace, and raise the temperature of the furnace body to 1000°C under a hydrogen atmosphere with a flow rate of 300 sccm, and keep the system pressure at 300 Pa. 50min.
[0050] (2) Keep the temperature of the furnace body at 1000° C., change the flow rate of hydrogen into 500 sccm of hydrogen gas, and feed into methane gas with a flow rate of 1 sccm. The system pressure is about 500 Pa, and keep for 8 hours.
[0051] (3) Use a magnet to drag t...
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