Rare earth polishing powder and preparation method thereof

A technology of rare earth polishing powder and rare earth chloride, applied in polishing compositions containing abrasives, etc., can solve the problems of complex compounding process of fluoride and oxide, complex post-treatment process, secondary sintering of particles, etc., and achieve polishing The effect of easy control of precision, low cost and fast polishing rate

Inactive Publication Date: 2018-12-21
上海祥介德新材料科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Rare earth fluoride particles are relatively fine, and the post-treatment process is complicated; at the same time, the mixing process of fluoride and oxide is also relatively complicated; this method will cause the phenomenon of secondary sintering of particles, and some particles will grow abnormally after secondary roasting, forming Localized coarse particles that cause scratches during polishing
[0012] In addition, the currently published patents all use ammonia water, oxalic acid, ammonium bicarbonate, etc. as precipitants to prepare rare earth polishing powder, which has cost and environmental protection pressure in terms of increasingly stringent environmental protection requirements

Method used

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Examples

Experimental program
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Effect test

Embodiment 1

[0046] In the mixed rare earth chloride, the mass ratio of each component is: total rare earth REO is 45%; cerium oxide is 70%, lanthanum oxide is 19.9%, and praseodymium oxide is 0.1%;

[0047] Mix the above 1000kg rare earth chloride with 2500kg water, dissolve it and heat to 60℃, slowly add the mixed solution of NaF and Na2CO3 (the mass fraction of NaF is 2.25%, the mass fraction of Na2C03 is 10%), to the final pH The value is 6.5. After stirring for 0.5h, add 20kg phosphoric acid (content 85%), then add 10% Na2CO3 aqueous solution, precipitate to pH 7, and continue stirring for 2h to obtain modified rare earth carbonate precursor slurry.

[0048] After the slurry was allowed to stand for 2 hours, the upper clear aqueous solution was removed, and the same amount of hot water at 85°C was added. After stirring for 1.5 hours and then standing for 3 hours, the upper clear aqueous solution was removed again, and the upper clear water was washed 3 times with supplementary heating water...

Embodiment 2

[0052] In the mixed rare earth chloride, the mass ratio of each component is: total rare earth REO is 45%; cerium oxide is 80%, lanthanum oxide is 19.9%, and praseodymium oxide is 0.1%;

[0053] Mix the above 1000kg rare earth chloride with 2500kg water, dissolve it and heat it to 80°C, slowly add a mixed solution of NaF and Na2CO3 (the mass fraction of NaF is 3%, and the mass fraction of Na2CO3 is 15%) to the end pH The value is 6.5. After stirring for 0.5h, add 7kg phosphoric acid (content 85%), then add 10% Na2CO3 aqueous solution, precipitate to pH 7, and continue stirring for 2h to obtain modified rare earth carbonate precursor slurry.

[0054] After the slurry was allowed to stand for 2 hours, the upper clear aqueous solution was removed, and the same amount of hot water at 50°C was added. After stirring for 0.5 hours and then standing for 2 hours, the upper clear aqueous solution was removed again, and the upper clear aqueous solution was washed with supplementary heating wat...

Embodiment 3

[0058] In the mixed rare earth chloride, the mass ratio of each component is: total rare earth REO is 45%; cerium oxide is 60%, lanthanum oxide is 35%, and praseodymium oxide is 3%;

[0059] Mix the above 1000kg rare earth chloride with 2500kg water, dissolve it and heat it to 80°C, slowly add a mixed solution of NaF and Na2CO3 (the mass fraction of NaF is 3%, and the mass fraction of Na2CO3 is 15%) to the end pH The value is 6.5. After stirring for 0.5h, 14kg phosphoric acid (content 85%) is added, followed by 10% Na2CO3 aqueous solution, precipitation to pH 7, and stirring is continued for 1h to obtain modified rare earth carbonate precursor slurry.

[0060] After the slurry was allowed to stand for 2 hours, the upper clear aqueous solution was pumped out, and the same amount of hot water at 70°C was added. After stirring for 1 hour and then standing for 2 hours, the upper clear aqueous solution was extracted again, and the upper clear aqueous solution was washed with supplementar...

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Abstract

The invention discloses rare earth polishing powder and a preparation method thereof. The rare earth polishing powder is prepared from the following components by mass percent: 60-80 percent of CeO2,30-40 percent of La2O3, 0.1-5 percent of Pr6O11, 4-6 percent of F of, and 1-3 percent of P2O5; the preparation method of the rare earth polishing powder comprises the steps of synthesizing a modifiedrare earth carbonate precursor, washing the modified rare earth carbonate precursor, dehydration of the modified rare earth carbonate precursor, calcinating, smashing, and the like. The rare earth polishing powder prepared by the method has good abrasion resistance and fast polishing speed, and the polishing precision is easily controlled; the rare earth polishing powder has the advantages of goodproduct homogeneity, high production efficiency, low cost and no pollution, and is applicable to surface polishing processing of electronic information industry precision devices such as an integrated circuit, a flat panel display and optical glass.

Description

Technical field [0001] The invention relates to a rare earth polishing powder and a preparation method thereof, in particular to a rare earth polishing powder applied to the surface polishing of precision devices in the electronic information industry such as integrated circuits, flat displays, optical glass and the like, and a preparation method thereof. Background technique [0002] At present, various glass materials are widely used, and these materials need to undergo necessary surface polishing before being applied. In the early days, materials such as zirconia, iron oxide, or silica were mainly used to polish the surface of various glass. In recent years, from the perspective of polishing efficiency and accuracy, polishing materials with rare earth oxides (especially cerium oxide) as the main component have been used It is considered more suitable for the surface polishing of glass materials. [0003] With the rapid development of electronic information technology, the deman...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C09G1/02
CPCC09G1/02
Inventor 蒙素玲郝祥
Owner 上海祥介德新材料科技有限公司
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