Method for preparing transition metal phosphide through chemical vapor deposition by using microwave plasmas

Abstract

The invention discloses a method for preparing transition metal phosphide through chemical vapor deposition by using microwave plasmas. The method comprises the following steps: (1) putting a ceramicboat with sodium hypophosphite and a hydroxide precursor nano piece of a transition metal onto a graphite table in a cavity together, closing the cavity, and vacuumizing the cavity; (2) feeding nitrogen into the cavity, and adjusting microwave power to generate nitrogen plasmas and phosphine plasmas; (3) adjusting the flow rate of the nitrogen to maintain the gas pressure in the cavity within a range of 15 to 23 torr, ending the reaction after the state of the plasmas is stable and the plasmas cover the sample for reaction for 0.5 to 3 min, and shutting off a microwave source; (4) after the cavity is cooled, taking out the sample, thereby obtaining the transition metal phosphide. Nano particles of the transition metal phosphide prepared by the method are small in particle size and high incrystallinity, so that the catalysis performance and the reliability of the transition metal phosphide are improved; test and characterization of the catalysis field are facilitated, and the electrocatalytic characteristic of the transition metal phosphide can be researched favorably.

Description

technical field [0001] The invention relates to the field of nanometer material preparation, in particular to a method for preparing transition metal phosphide by microwave plasma chemical vapor deposition. Background technique [0002] Due to the rapid decline of petroleum fuels, hydrogen energy has attracted widespread attention as a clean and sustainable energy source. However, today's high-performance hydrogen production catalysts are generally noble metal materials represented by rare Pt, so it is very important to develop non-precious metal hydrogen production catalyst substitutes. With the continuous development of the field of catalysis, transition metal phosphides have gradually attracted people's attention due to their stable and efficient hydrogen production performance, and have become the focus of research in the field of new material catalysis, but currently prepared transition metal phosphides generally contain nanoparticles. The problem of large particle siz...

AI Technical Summary

Problems solved by technology

With the continuous development of the field of catalysis, transition metal phosphides have gradually attracted people's attention due to their stable and efficient hydrogen production performance, and have become the focus of research in the field of new material catalysis, but currently prepared transition metal phosphides generally contain nanoparticles. The problem of large particle size and low crystallinity restricts its catalytic performance, and its reliability needs to be improved.

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