Rear light splitting pupil differential confocal LIBS-mass spectrometry microscopic imaging method and device

Abstract

The invention discloses a rear light splitting pupil differential confocal LIBS-mass spectrometry microscopic imaging method and device, and belongs to the technical fields of confocal microscopic imaging, spectral imaging and mass spectrometry imaging measurement. A rear light splitting pupil laser differential confocal microscopic imaging technology is combined with spectrometry and mass spectrometry detection technologies; high-spatial-resolution morphological imaging is carried out on a sample by utilizing a tiny focusing light spot of a rear light splitting pupil differential confocal microscope processed by a super-resolution technology; a mass spectrometry detection system is used for carrying out mass spectrometry detection on electrified molecules, atoms and the like of a micro-region; a spectrometry detection system is used for carrying out micro-region spectrometry detection on an LIBS excited by the focusing light spot; and high-spatial-resolution and high-sensitivity imaging and detection of complete component information and morphological parameters of the micro-region of the sample are achieved by utilizing complementary advantages of laser multi-spectrum detection and structure fusion. A brand new effective technical way can be provided for morphological imaging and substance component detection in the fields of biomedical science, material science, minerals, micro-nano manufacturing and the like.

Description

technical field [0001] The invention belongs to the field of confocal microscopic imaging technology, spectral imaging technology and mass spectrometry imaging technology, and combines rear split pupil differential confocal micro imaging technology, laser induced breakdown spectral imaging technology and mass spectrometry imaging technology, and relates to a rear split pupil The differential confocal LIBS spectrum-mass spectrometer imaging method and device have broad application prospects in the fields of biomedicine, materials science, physical chemistry, minerals, and micro-nano manufacturing. technical background [0002] Mass Spectrometry (Mass Spectrometry) is to ionize the components in the sample, so that the generated charged atoms, molecules or molecular fragments with different charge-to-mass ratios are respectively focused under the action of an electric field and a magnetic field to obtain a sequence of mass-to-charge ratios. Spectrograph instrument. Mass spect...

AI Technical Summary

Problems solved by technology

[0005] 1) Due to the use of simple laser focusing to desorb and ionize the sample, there are still problems such as large laser focusing spot and low spatial resolution of mass spectrometry detection;

[0006] 2) It is impossible to detect neutral atoms, molecules, neutral ions and groups, etc., which restricts the accurate and complete acquisition of sample component information;

[0007] 3) The time required for mass spectrometry imaging is long, and the axial position of the focused spot of the laser mass spectrometer often drifts relative to the sample to be measured

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