Miniature spatial hydrogen detection microsensor and preparation method thereof

A micro-sensor, micro-space technology, applied in instruments, measuring devices, scientific instruments, etc., can solve the problems of low power consumption, short life, load volume, weight and power consumption limitations, and achieve low power consumption, light weight, Small size effect

Inactive Publication Date: 2019-01-15
LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
View PDF4 Cites 4 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, due to the characteristics of light weight, small size, low power consumption and short life of the micro-nano satellite, it has strict restrictions on the volume, weight and power consumption of the payload.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Miniature spatial hydrogen detection microsensor and preparation method thereof
  • Miniature spatial hydrogen detection microsensor and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0029] The present invention will be described in detail below with reference to the accompanying drawings and examples.

[0030] A micro-sensor for hydrogen detection in a miniature space, the sensor includes a silicon oxide substrate 1, a PdNi hydrogen-sensitive thin film 4, a temperature measuring resistor 2, a heating resistor 3, and a welding pad 5, and the outer dimensions of the sensor are 3.5mmx3.5mmx0.5mm, such as figure 1 shown. The sensor can quantitatively obtain the hydrogen concentration by measuring the resistance change of the sensitive film after absorbing hydrogen. The temperature measuring resistor 2 and the heating resistor 3 ensure that the working temperature of the sensor in the space environment is within the range of 20°C to 50°C. Rapid dehydrogenation recovery after hydrogen uptake.

[0031] The substrate 1 is made of silicon oxide material, which is used for carrying the entire sensor;

[0032] The temperature-measuring resistor 2 on the sensor ado...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
electrical resistanceaaaaaaaaaa
electrical resistanceaaaaaaaaaa
Login to view more

Abstract

The invention discloses a miniature spatial hydrogen detection microsensor. A palladium-nickel resistance hydrogen sensor is prepared by adopting a palladium-nickel alloy as a hydrogen sensitive material; the processing technology is simple and the integration is easy, the defects of the over-adsorption and trailing phenomena and falling of a sensitive film by using pure palladium as the hydrogensensitive material are effectively solved. The palladium-nickel hydrogen sensitive material is designed as a graphical broken-line wire-like film structure; compared with the pure palladium structure,more sensitive sites can be produced inside a palladium-nickel hydrogen sensitive film, and a hollow cavity and a recess are produced in a microstructure, the specific surface area of the palladium-nickel hydrogen sensitive film is increased to a certain degree, a higher signal strength can be obtained, other hydrogen sensors are incomparable under the same conditions; the sensor belongs to an important constituent part of spatial hydrogen atom in-situ miniature detector, can be carried on a micro-nano satellite platform, can detect the hydrogen atom density with an extremely low density, andis low in power consumption, small in size and light in weight.

Description

technical field [0001] The invention belongs to the technical field of gas concentration detection, and in particular relates to a miniature space hydrogen detection microsensor and a preparation method thereof. Background technique [0002] The abundance of H element in the space environment is 95%. The detection of H element has important academic value and scientific significance for revealing the origin of the universe, verifying the big bang theory and the cosmic redshift theory. Atomic hydrogen is the most important neutral component in the atmospheric composition of the upper space environment, and its composition changes are of great significance to the physics of the upper atmosphere and solar physics, for example, atmospheric chemistry, the coupling process of plasma and neutral particles, magnetic The energy dissipation process of the layer and the geomagnetic storm are related to it. In addition, as the lightest neutral component in the atmosphere, atomic hydrog...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/12G01K7/18
CPCG01K7/183G01N27/125
Inventor 张剑锋黄一凡蒋洪川杨生胜薛玉雄郭睿郭兴苗育军张晨光乔佳王光毅庄建宏
Owner LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap