A method for in-situ and real-time diagnosis of luminescent quantum dot decay using plasma
A plasma and luminescent quantum technology, applied in thermal excitation analysis, material excitation analysis, coating, etc., can solve the problems of perovskite quantum dot luminous efficiency decline, perovskite quantum dot decay, surface defect density increase, etc. , to achieve the effects of easy practical application, improved luminous characteristics and stability, and low cost
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Embodiment 1
[0032] a) In a flat capacitive RF plasma enhanced chemical vapor deposition device, a quartz substrate coated with CsPbBr3 perovskite quantum dots is placed on the upper surface of the grounded lower plate (anode);
[0033] b) At room temperature, feed NH 3 Gas, chamber pressure set at 10-200Pa;
[0034] c) Add a radio frequency signal with a radio frequency power of 5-60W to the upper plate to generate NH 3 plasma;
[0035] d) Detection of CsPbBr excited by plasma glow by optical emission spectrometer 3 Green light emission signal of perovskite quantum dots, and record the green light emission intensity with NH 3 The relationship between plasma treatment time, such as figure 2 shown.
[0036] e) The results show that NH 3 Plasma-provided reactive groups for CsPbBr 3 Perovskite quantum dots have less of a recession impact.
Embodiment 2
[0038] a) In the flat capacitive radio frequency plasma enhanced chemical vapor deposition equipment, will be coated with CsPbBr 3 A quartz substrate of perovskite quantum dots is placed on the upper surface of a grounded lower plate (anode);
[0039] b) At room temperature, pass through O 2 Gas, chamber pressure set at 10-200Pa;
[0040] c) Add a radio frequency signal with a radio frequency power of 5-60W to the upper plate to generate O 2 plasma.
[0041] d) Detection of CsPbBr excited by plasma glow by optical emission spectrometer 3 Green light emission signal of perovskite quantum dots, and record the green light emission intensity with O 2 The relationship between plasma treatment time, such as image 3 shown.
[0042] e) The results show that O 2 The active groups provided by the plasma will cause CsPbBr 3 Rapid decay of perovskite quantum dots.
Embodiment 3
[0044] a) In the flat capacitive radio frequency plasma enhanced chemical vapor deposition equipment, will be coated with CsPbBr 3 A quartz substrate of perovskite quantum dots is placed on the upper surface of a grounded lower plate (anode);
[0045] b) At room temperature, pass through SiH 4 and O 2 Gas, chamber pressure set at 10-200Pa;
[0046] c) Add a radio frequency signal with a radio frequency power of 5-60W to the upper plate to generate SiH 4 and O 2 Hybrid plasma.
[0047] d) Detection of CsPbBr excited by plasma glow by optical emission spectrometer 3 Green light emission signal of perovskite quantum dots, and record the green light emission intensity with SiH 4 and O 2 The relationship between mixed plasma processing time, such as Figure 4 shown.
[0048] e) The results show that SiH 4 +O 2 The active groups provided by the plasma will cause CsPbBr 3 The rapid decay of perovskite quantum dots, so the active groups provided by the mixed plasma cannot ...
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