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AlCrSiN and AlCrSiON double-layer nano composite coating and preparation method thereof

A nano-composite coating and coating technology, applied in the direction of coating, metal material coating process, superimposed layer plating, etc., can solve the problem that the bonding strength of AlCrSiON coating needs to be improved, and achieve high bonding strength and high hardness. and toughness, high temperature thermal stability and corrosion resistance

Active Publication Date: 2019-03-01
TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the hardness, wear resistance, and bonding strength of the pure AlCrSiON coating need to be improved.

Method used

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  • AlCrSiN and AlCrSiON double-layer nano composite coating and preparation method thereof
  • AlCrSiN and AlCrSiON double-layer nano composite coating and preparation method thereof
  • AlCrSiN and AlCrSiON double-layer nano composite coating and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0024] In this example, a coating is deposited on a mirror-polished single-crystal Si wafer ((100) orientation), and the sample size is 40×20×0.7mm; the sample is first ultrasonically cleaned in acetone and alcohol solutions for 20 minutes. , and then dry it with high-purity nitrogen, and then place it on the sample holder in the vacuum chamber facing the target. The coating equipment adopts AIP-650 arc ion coating machine, and the cathode target is made of metal Cr (purity 99.9wt.%) and alloy AlCrSi (6:3:1), and metal Cr is used for bombardment cleaning and deposition of transition layer on the surface of the substrate. Alloy AlCrS is used for deposition coating, and working gas selects high-purity Ar and N2 (purity is 99.99%); The preparation method of AlCrSiN and AlCrSiON double-layer nanocomposite coating is as follows:

[0025] Step 1: Pump the background vacuum of the vacuum chamber to 2×10 -3 Pa, turn on the heating system to raise the temperature of the furnace body t...

Embodiment 2

[0032] In this example, a coating is deposited on a mirror-polished hard alloy sheet. The size of the sample is 25 × 25 × 2mm. The sample is first ultrasonically cleaned in acetone and alcohol solutions for 20 minutes, and then dried with high-purity nitrogen. , and then place it on the sample holder in the vacuum chamber facing the target. The coating equipment adopts AIP-650 type arc ion coating machine, the cathode target is made of pure metal Cr (purity 99.9wt.%) and alloy AlCrSi (6:3:1), and the working gas is high-purity Ar and N2 (both purity 99.99 %). The preparation method of AlCrSiN and AlCrSiON double-layer nanocomposite coating is as follows:

[0033] Step 1: Pump the background vacuum of the vacuum chamber to 2×10 -3 Pa, turn on the heating system to raise the temperature of the furnace body to 400°C; feed 400sccm argon, adjust the pulse bias to -800V, and keep the working pressure at 2×10 -3 pa, glow cleaning for 20 minutes;

[0034] Step 2: Then adjust the a...

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Abstract

The invention discloses an AlCrSiN and AlCrSiON double-layer nano composite coating and a preparation method thereof. The preparation method comprises the following steps that the cleaned hard alloy to be coated is placed in a coating machine for glow cleaning; then a Cr target is turned on, the arc source current is adjusted to 90A, and pulsed bias is adjusted and is separately subjected to bombardment cleaning at -800V, -600V, -400V and -200V, wherein each cleaning is carries out for 2 min; 50 sccm of argon is introduced, 200 sccm of nitrogen is introduced, the pulsed bias is adjusted to -100 V, a CrN metal nitride transition layer is deposited for 20min; the Cr target is turned off, two AlCrSi targets are turned, a current is 90A, 50 sccm of argon is introduced, 600 sccm of nitrogen isintroduced, temperature is heated to 450 DEG C, firstly bias voltage gradient is increased from 80V to 200V, and a AlCrSiN coating is deposited for 90 min; and then, 20 sccm of oxygen is introduced, the bias voltage gradient is decreased from 200 V to 80 V, and an AlCrSiON coating is deposited for 90 min. The nano composite coating has higher hardness, toughness and abrasion resistance, and has higher bonding strength compared with a substrate.

Description

technical field [0001] The invention belongs to the technical field of coating preparation, and in particular relates to an AlCrSiN and AlCrSiON double-layer nanocomposite coating and a preparation method thereof. Background technique [0002] Today, with the rapid development of the globalization trend of manufacturing technology, the requirements for cutting technology in the machining industry are gradually increasing. The emergence of tool coating makes the processing efficiency, accuracy and specialization all conducive to the progress of the manufacturing industry, so the tool coating technology has attracted widespread attention from various countries in the world. The wide application of various high-strength alloys and chilled cast iron, and the continuous improvement of machining accuracy and efficiency requirements for thin-walled cylinder blocks, cylinder heads, crankshafts, and camshafts of automobile engines have put forward new requirements for high-speed cutt...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/34
CPCC23C14/0036C23C14/0641C23C14/0676C23C14/3464C23C28/044
Inventor 王铁钢林伟张姣姣侯翔阎兵刘艳梅
Owner TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE