AlCrSiN and AlCrSiON double-layer nano composite coating and preparation method thereof
A nano-composite coating and coating technology, applied in the direction of coating, metal material coating process, superimposed layer plating, etc., can solve the problem that the bonding strength of AlCrSiON coating needs to be improved, and achieve high bonding strength and high hardness. and toughness, high temperature thermal stability and corrosion resistance
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Embodiment 1
[0024] In this example, a coating is deposited on a mirror-polished single-crystal Si wafer ((100) orientation), and the sample size is 40×20×0.7mm; the sample is first ultrasonically cleaned in acetone and alcohol solutions for 20 minutes. , and then dry it with high-purity nitrogen, and then place it on the sample holder in the vacuum chamber facing the target. The coating equipment adopts AIP-650 arc ion coating machine, and the cathode target is made of metal Cr (purity 99.9wt.%) and alloy AlCrSi (6:3:1), and metal Cr is used for bombardment cleaning and deposition of transition layer on the surface of the substrate. Alloy AlCrS is used for deposition coating, and working gas selects high-purity Ar and N2 (purity is 99.99%); The preparation method of AlCrSiN and AlCrSiON double-layer nanocomposite coating is as follows:
[0025] Step 1: Pump the background vacuum of the vacuum chamber to 2×10 -3 Pa, turn on the heating system to raise the temperature of the furnace body t...
Embodiment 2
[0032] In this example, a coating is deposited on a mirror-polished hard alloy sheet. The size of the sample is 25 × 25 × 2mm. The sample is first ultrasonically cleaned in acetone and alcohol solutions for 20 minutes, and then dried with high-purity nitrogen. , and then place it on the sample holder in the vacuum chamber facing the target. The coating equipment adopts AIP-650 type arc ion coating machine, the cathode target is made of pure metal Cr (purity 99.9wt.%) and alloy AlCrSi (6:3:1), and the working gas is high-purity Ar and N2 (both purity 99.99 %). The preparation method of AlCrSiN and AlCrSiON double-layer nanocomposite coating is as follows:
[0033] Step 1: Pump the background vacuum of the vacuum chamber to 2×10 -3 Pa, turn on the heating system to raise the temperature of the furnace body to 400°C; feed 400sccm argon, adjust the pulse bias to -800V, and keep the working pressure at 2×10 -3 pa, glow cleaning for 20 minutes;
[0034] Step 2: Then adjust the a...
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