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TFT-LCD copper-molybdenum alloy etching liquid

A technology of copper-molybdenum alloy and etching solution, which is applied in the field of TFT-LCD copper-molybdenum alloy etching solution, can solve the problems of small copper ion loading, short service life, poor stability, etc., and achieve large copper ion loading and etching morphology Good, good stability

Inactive Publication Date: 2019-04-02
JIANGSU AISEN SEMICON MATERIAL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] At present, most TFT-LCD copper etching solutions on the market with hydrogen peroxide content higher than 8% are hazardous chemicals, or contain fluorine, are not environmentally friendly, waste liquid is difficult to handle, small copper ion loading, poor stability, short service life, etc. question

Method used

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  • TFT-LCD copper-molybdenum alloy etching liquid
  • TFT-LCD copper-molybdenum alloy etching liquid
  • TFT-LCD copper-molybdenum alloy etching liquid

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Embodiment 1～10

[0016] Prepare the copper etching solution according to the formula in Table 1. The steps are: in the dust-free laboratory, add deionized water, hydrogen peroxide, inorganic acid, organic acid, salts, organic additives, corrosion inhibitors, or selected Add other additives, and stir evenly.

[0017] Table 1: Unit: wt%

[0018]

[0019]

[0020] Note: The part of the total proportion less than 100wt% in Table 1 is deionized water.

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Abstract

The invention belongs to the technical field of pan-semiconductor display processing and relates to TFT-LCD copper-molybdenum alloy etching liquid. The TFT-LCD copper-molybdenum alloy etching liquid is prepared from the following components in a formula in percentage by weight: 1-8% of hydrogen peroxide, 0.01-5% of inorganic acid, 0.1-20% of organic acid, 0.01-5% of a salt, 0.5-10% of an organic addition agent, 0.01-5% of a corrosion inhibitor and the balance of deionized water; the organic addition agent comprises one of polyethylene glycol, fatty alcohol-polyoxyethylene ether, diethylene glycol, triethylene glycol and ethylene glycol monobutyl ether. According to the TFT-LCD copper-molybdenum alloy etching liquid, etching is uniform, etching morphology is great, meanwhile the loading capacity of cupric ions is large, stability is good, and the cupric ion is more environmentally friendly.

Description

technical field [0001] The invention relates to the technical field of pan-semiconductor display processing, in particular to a TFT-LCD copper-molybdenum alloy etching solution. Background technique [0002] TFT-LCD is the abbreviation of thin film transistor liquid crystal display (thin film transistor-liquid crystal display). TFT-LCD technology is a skillful combination of microelectronics technology and liquid crystal display technology. People use the technology of microelectronic fine processing on si to transplant TFT array processing on large-area glass, and then use the mature LCD technology to form the array substrate and another substrate with color filter film. A liquid crystal cell is combined, and then undergoes post-processes such as polarizer coating and other processes, and finally forms a liquid crystal display. [0003] At present, most TFT-LCD copper etching solutions on the market with hydrogen peroxide content higher than 8% are hazardous chemicals, or...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23F1/18
CPCC23F1/18
Inventor 杜冰刘伟方磊张兵赵建龙向文胜
Owner JIANGSU AISEN SEMICON MATERIAL CO LTD