Workpiece with diamond/graphene composite lubricating film and preparation method thereof

A graphene composite, diamond thin film technology, applied in the field of materials, achieves the effects of strong bonding force, improved wear resistance, and not easy to fall off

Pending Publication Date: 2019-05-07
SHENZHEN INST OF ADVANCED TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the workpiece covered with diamond film greatly reduces the coefficient of friction, it cannot meet people's requirements. Especially

Method used

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  • Workpiece with diamond/graphene composite lubricating film and preparation method thereof
  • Workpiece with diamond/graphene composite lubricating film and preparation method thereof
  • Workpiece with diamond/graphene composite lubricating film and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0032] The second aspect of the present invention provides a method for preparing a workpiece provided with a diamond / graphene composite lubricating film, including:

[0033] Providing a workpiece body, depositing an ultra-nano diamond film on the workpiece body, and depositing a transition metal layer on the surface of the ultra-nano diamond film;

[0034] The workpiece body on which the transition metal layer and the ultra nano diamond film are deposited is placed in the cavity of a hot filament vapor deposition chamber for annealing treatment, and the transition metal in the transition metal layer catalyzes part of the carbon in the ultra nano diamond film The elements form a graphene layer, and a diamond / graphene composite lubricating film is prepared on the surface of the workpiece body, the annealing temperature is 1000-1300° C., and the annealing time is 1-3 min.

[0035] Optionally, the material of the workpiece body includes metal, silicon, hard alloy, silicon nitride or cer...

Example Embodiment

[0049] Example 1:

[0050] A method for preparing a workpiece provided with a diamond / graphene composite lubricating film, including:

[0051] (1) Using hot filament vapor deposition method to deposit and grow diamond film on the substrate surface. Place the substrate material-silicon wafer in a beaker filled with acetone and deionized water for 10 min each ultrasonic cleaning to remove oil stains and other impurities attached to the sample surface; then place the cleaned substrate in the nano-diamond powder suspension Ultrasound for 30-45min. The average particle size of the diamond powder suspension is 5nm, which exists in the most dispersed form, and the Zeta potential is about ±50mV. Then place the processed substrate on the HFCVD substrate stage and vacuumize to 10 -5 Below Pa, the diamond film begins to nucleate and grow. The specific parameters of HFCVD work are as follows: the hot wire array is composed of 9 tantalum wires with a diameter of 0.5mm, the distance between t...

Example Embodiment

[0055] Example 2:

[0056] A method for preparing a workpiece provided with a diamond / graphene composite lubricating film, including:

[0057] Step (1) and step (2) are the same as in Example 1;

[0058] (3) Using hot filament vapor deposition equipment for rapid annealing to obtain graphene. Put the sample plated with a metallic nickel layer into the HFCVD cavity for rapid annealing. During the annealing process, the specific parameters of HFCVD work: the hot wire array consists of 9 tantalum wires with a diameter of 0.5mm, the distance between the hot wire and the sample surface is 8mm, the nitrogen / hydrogen flow rate: 425sccm / 75sccm, the total gas flow rate: 500sccm , Air pressure: 2800Pa, heating wire power: 5000W, heating sample temperature at 1200℃, after holding at 1200℃ for 2min, cooling to 300℃ at a rate of 30℃ / min, and then opening the hot filament vapor deposition chamber Body, cool the workpiece to room temperature.

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Abstract

The invention provides a workpiece with a diamond/a graphene composite lubricating film. The workpiece comprises a workpiece body and a diamond/a graphene composite lubricating film arranged on the surface of the workpiece body, wherein the diamond/graphene composite lubricating film comprises an ultra-nano diamond film arranged on the surface of the workpiece body and a graphene layer is arrangedon the ultra-nano diamond thin film; and the diamond/graphene composite lubricating film can obviously improve the friction resistance of the workpiece. The invention further provides a preparation method of the workpiece with the diamond/the graphene composite lubricating film. The preparation method comprises the following steps that the ultra-nano diamond thin film is deposited on the workpiece body, and then a transition metal layer is deposited on the surface of the ultra-nano diamond thin film; the workpiece body deposited with the transition metal layer and the ultra-nano diamond filmis placed in a cavity of a hot wire vapor deposition chamber for annealing treatment, the diamond/graphene composite lubricating film is manufactured on the surface of the workpiece body, the annealing temperature is 1000-1300 DEG C, and the annealing time is 1-3 minutes

Description

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Claims

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Application Information

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Owner SHENZHEN INST OF ADVANCED TECH
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