Gas sensor based on silicon-based mid-infrared sub-wavelength grating waveguide

A sub-wavelength grating and gas sensor technology, which is applied in the field of sensor detection, can solve the problems of high energy consumption, long activation time, and inability to detect gas dynamics in gas sensors, and achieve high sensitivity, low cost, and fast response.

Inactive Publication Date: 2019-06-04
CHINA JILIANG UNIV
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  • Abstract
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  • Application Information

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Problems solved by technology

[0004] In order to overcome the shortcomings of the above-mentioned prior art, the present invention provides a silicon-based mid-infrared sub-wavelength grating waveguide gas sensor, which is used to solve the problem of high energy consumption, long activation time and inability to continuously monitor the gas in the prior art. The problem with dynamic detection

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  • Gas sensor based on silicon-based mid-infrared sub-wavelength grating waveguide
  • Gas sensor based on silicon-based mid-infrared sub-wavelength grating waveguide
  • Gas sensor based on silicon-based mid-infrared sub-wavelength grating waveguide

Examples

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Embodiment 1 2

[0042] Example 1 Carbon dioxide (CO 2 ) concentration detection

[0043] Carbon dioxide (C0 2 ) As the main component of greenhouse gases, it will not only cause the increase of ground temperature, climate anomalies, sea level rise and other greenhouse effect complications. C0 2 The molecule has an absorption peak at 4.26 μm, and the intensity of the mid-infrared absorption line is 4 to 5 orders of magnitude greater than that of the near-infrared. The mid-infrared quantum cascade laser is selected as the laser light source, and the wavelength coverage is mainly from 3.8 to 12 μm, which satisfies the C0 requirements well. 2 Strong absorption band around 4.26 μm. After the laser light source passes through the measured gas, the energy attenuation will occur at the corresponding spectral line, and the unabsorbed radiation is detected by the detector, and the measured gas concentration can be obtained by measuring the energy attenuation at the spectral line.

Embodiment 2

[0044] Example 2 Methane (CH 4 ) concentration detection

[0045] In the atmosphere, when the concentration of methane is below 5%, it can burn when encountering a fire source, but cannot explode. When the concentration of methane is about 5.3% to 15%, it will explode when it encounters a fire source, and when it is 9.5%, the explosion ability is the strongest. The main component of gas in mines is methane, accounting for about 83-89%. Mine gas is an important source of natural disasters in coal mines. Methane molecules have a strong absorption spectrum at 3.3-3.45 μm. After the mid-infrared laser passes through the measured gas, energy attenuation will occur at the corresponding spectral line. The unabsorbed radiation is detected by the detector. Through the measurement The attenuation of energy at the spectral line can be used to obtain the concentration of the gas to be measured.

[0046] As mentioned above, the mid-infrared sub-wavelength grating waveguide gas sensor of...

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Abstract

The invention discloses a sensor system based on a silicon-based mid-infrared sub-wavelength grating waveguide structure, which comprises a laser source, a prism coupling, a gas flow cell, a silicon-based mid-infrared sub-wavelength grating waveguide, a detector, and a computer. The basic principle is that interaction between light generated by the laser source and the gas affects the refractive index distribution of the waveguide mode in the sensor, the variation of a resonance peak in the output spectrum of the sensor is further affected, and based on the variation of the resonance peak, gastype and concentration detection is realized. According to the silicon-based sub-wavelength grating waveguide, top Si of a silicon-on-insulator material is etched to form a sub-wavelength grating (SWG) waveguide, holes are opened at two sides of the waveguide, the insulating layer SiO2 middle part is hollowed out, and a suspension waveguide structure with air as a lower cladding is formed. The gas sensor disclosed in the invention does not require fluorescent labeling, has high sensitivity and can effectively monitor gases such as CO2 and CH4 which have a spectral response in the mid-infraredspectral region.

Description

technical field [0001] The invention belongs to the field of sensor detection, and relates to a gas sensor based on a silicon-based mid-infrared sub-wavelength grating waveguide, which is applied to the detection of greenhouse gases and harmful gases. technical background [0002] Conventional semiconductor-type gas sensors, based on SnO 2 The gas sensor is the representative, and its detection principle is mainly to measure the change of electrical conductivity caused by the oxidation-reduction reaction with the adsorbed gas at high temperature. Due to the porous structure, water vapor and the measured gas are easy to condense and hysteresis after entering the hole. Thus affecting the sensitivity of the sensor. At the same time, because the sensor has a heating element with high energy consumption, the sensor needs to be activated for one to ten minutes before the measurement. The traditional semiconductor gas sensor has the disadvantages of high energy consumption, long a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/41G01N21/3504
Inventor 曹馨艺金尚忠王赟陈智慧侯彬
Owner CHINA JILIANG UNIV
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