A kind of tantalum/steel bimetal composite material and preparation method thereof
A composite material and bimetallic technology, which is applied in metal material coating process, vacuum evaporation plating, coating, etc., can solve the problems of low bonding strength and low overall material strength, improve interface performance, eliminate residual stress, The effect of accelerated diffusion
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[0034] A kind of preparation method of tantalum / steel bimetallic composite material of the present invention comprises the following steps:
[0035] Step 1: Prepare a steel substrate and a tantalum target. The carbon content of the steel substrate is 0.5-1.0wt%, and the tantalum content of the tantalum target is Ta≥99.99wt%. The steel substrate is alloy steel, carbon steel or tool steel.
[0036] Step 2: Grinding and polishing the surface of the steel substrate so that the surface roughness of the steel substrate is 0.01-0.04 μm, then putting the steel substrate into ethanol for ultrasonic cleaning, and then cleaning and drying;
[0037] Step 3: Use vacuum magnetron sputtering equipment to sputter the tantalum target on the surface of the steel substrate to make a tantalum-steel composite material;
[0038] The specific process of step 3 is:
[0039] Step 3.1: Fix the steel substrate on the sputtering platform of the vacuum magnetron sputtering equipment, then put the tantalu...
Embodiment 1
[0047] Adopt 55CrNi2MoV alloy steel to prepare tantalum / steel bimetallic composite material, comprise the following steps:
[0048] Step 1: prepare a steel substrate and a tantalum target, the steel substrate is 55CrNi2MoV alloy steel, and the carbon content in it is 0.5wt%; the tantalum content of the tantalum target is Ta≥99.99wt%, the diameter is 40mm, and the thickness is 5.5mm;
[0049] Step 2: Grinding and polishing the surface of the steel substrate so that the surface roughness of the steel substrate is 0.02 μm, then putting the steel substrate into ethanol for ultrasonic cleaning, and then cleaning and drying;
[0050] Step 3: Fix the steel substrate on the sputtering platform of the vacuum magnetron sputtering equipment, then put the tantalum target into the magnetron sputtering chamber, ensure that the distance between the surface of the steel substrate and the tantalum target is 60mm, and turn off the magnetron sputtering chamber;
[0051] Vacuumize the magnetron ...
Embodiment 2
[0058] Adopt 60 carbon steel to prepare tantalum / steel bimetallic composite material, comprise the following steps:
[0059] Step 1: Prepare a steel substrate and a tantalum target. The steel substrate is 60 carbon steel with a carbon content of 0.65wt%; the tantalum target has a tantalum content Ta≥99.99wt%, a diameter of 30mm, and a thickness of 5mm;
[0060] Step 2: Grinding and polishing the surface of the steel substrate so that the surface roughness of the steel substrate is 0.01 μm, then putting the steel substrate into ethanol for ultrasonic cleaning, and then cleaning and drying;
[0061] Step 3: Fix the steel substrate on the sputtering platform of the vacuum magnetron sputtering equipment, then put the tantalum target into the magnetron sputtering chamber, ensure that the distance between the surface of the steel substrate and the tantalum target is 50mm, and turn off the magnetron sputtering chamber;
[0062] Vacuumize the magnetron sputtering chamber so that the ...
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