A coated pressure sensor based on pdms material and its preparation method

Abstract

The present invention is a coated pressure sensor based on PDMS material and a preparation method thereof, belonging to the technical field of flexible pressure sensors; the technical problem to be solved is: providing a coated pressure sensor structure based on PDMS material and a preparation method thereof. Improvement; the technical solution adopted to solve the technical problem is: including a sponge composite skeleton as a three-dimensional porous frame, the surface of the three-dimensional porous structure of the sponge composite skeleton is covered with PDMS material, and the interior of the sponge composite skeleton is also filled with conductive nanometers Materials; electrodes are respectively provided on both sides of the sponge composite skeleton, and the electrodes are bonded to the surface of the sponge composite skeleton through a PDMS film; the electrodes are specifically conductive tapes coated with conductive silver paste on the surface; the present invention is applied to Fabrication of flexible tactile sensors.

Description

technical field [0001] The present invention is a coated pressure sensor based on PDMS material and a preparation method thereof, belonging to the technical field of flexible pressure sensors. Background technique [0002] Electronic skin is one of the most cutting-edge research directions of smart materials and sensors, and it is also an emerging field of contemporary electronic information industry development. It has important application value in artificial intelligence, communication and entertainment, medical health and other fields. It is an important way for robots to perceive external environment information that is only visual, and it is one of the necessary media for robots to achieve direct interaction with the external environment or target. The world has important scientific significance and application value. [0003] With the development of science and technology and the continuous improvement of production and preparation processes, higher requirements have...

AI Technical Summary

Problems solved by technology

[0003] With the development of science and technology and the continuous improvement of production and preparation technology, higher requirements are put forward for robot tactile sensors in terms of functional structure and appearance characteristics. Flexible tactile sensors with characteristics such as tactile perception have become a research hotspot for electronic skin; traditional silicon-based and metal strain gauge tactile sensors cannot meet the functional requirements of flexibility, ductility, and wearing comfort, so nano-conductive materials are filled in flexible substrates. The preparation of force-sensitive conductive composites is widely used in the design of flexible tactile sensors

[0004] According to different working principles, flexible tactile sensors can be roughly divided into photoelectric, piezoelectric, resistive, and capacitive types. Among them, capacitive flexible tactile sensors have high sensitivity, high precision, fast response rate, small hysteresis, and are easy to use. Integration and other advantages are widely used in the research of electronic skin for intelligent robots; the sensitivity of traditional flexible tactile sensors based on composite materials is low in the low-voltage region. It is a common method to improve the tactile detection sensitivity of robotic electronic skin. The common microstructures mainly include pyramid, tentacle-shaped, concave-convex, microneedle structure, etc. Usually, when designing the microstructure of the sensitive layer, the preparation process often requires complex processes. , such as lithography, sputtering, evaporation, etching, etc., and there are disadvantages such as not being easy to produce on a large scale

[0005] The common preparation methods of three-dimensional porous microstructure composite conductive materials are: vacuum freeze-drying method and chemical vapor deposition method; the vacuum freeze-drying method is also called sublimation drying, and its principle is to dry the wet material or solution at a lower temperature (-50 ° C ~ -10°C) to freeze into a solid state, and then under vacuum (1.3-12Pa), the water in it is directly sublimated into a gaseous state without liquid state to achieve the purpose of drying. The flexible tactile sensor prepared by this method can achieve higher detection Sensitivity (~0.8kPa-1), low detection limit (~0.24Pa), fast response (~100ms), etc.; but the vacuum freeze-drying method has disadvantages such as expensive equipment, energy consumption and high cost of material preparation;

[0006] Chemical vapor deposition (CVD) usually uses a three-dimensional nickel foam material as a template to chemically vapor-deposit conductive materials such as graphene on the three-dimensional framework, and then remove the foam nickel framework by chemical etching to obtain a three-dimensional porous microstructure graphene conductive foam. , the flexible tactile sensor prepared by this method can realize high sensitivity (gauge factor GF=35), fast response (~30ms), good stability (cycle number>5000) tactile perception function; but chemical vapor deposition generally has deposition The rate is not high, the deposition process is easy to pollute the surface of the film and the environment, etc., and the equipment often has corrosion resistance requirements

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