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Oblique interdigital transducer-based preparation device and method for variable-spacing microstructure

A technology for preparing devices and transducers, used in manufacturing auxiliary devices, 3D object support structures, additive manufacturing, etc., can solve the problems of low manufacturing accuracy of additive manufacturing technology, difficulty in meeting high-precision applications, and high requirements for micro-manufacturing equipment , to achieve the effect of mature manufacturing process, fast forming speed and high production efficiency

Active Publication Date: 2019-12-20
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This method is the same as the operation method of macro-machining equipment, but this micro-manufacturing technology has high requirements for micro-manufacturing equipment, long production cycle and low production efficiency.
Additive manufacturing technology, such as inkjet printing method, photocuring printing method, etc., the thermal effect of the nozzle or ultraviolet light irradiation has a certain degree of damage to the performance of the material, and the manufacturing accuracy of the additive manufacturing technology is low, which is difficult to meet high-precision applications. Occasion needs

Method used

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  • Oblique interdigital transducer-based preparation device and method for variable-spacing microstructure
  • Oblique interdigital transducer-based preparation device and method for variable-spacing microstructure
  • Oblique interdigital transducer-based preparation device and method for variable-spacing microstructure

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0050] (1) Manufacture the preparation device of the variable-pitch microstructure based on the oblique finger transducer. Spin-coat a layer of positive photoresist on the lithium niobate wafer 1, and after baking the wafer, expose it with a mask plate with oblique finger electrode patterns to transmit light and the rest of which is coated with a metal chromium layer, and wash away the exposed photoresist. Glue, to obtain a glue-free area with the same shape and size as the metal electrode on the wafer; use physical vapor deposition to deposit a layer of metal titanium with a thickness of 20nm on the lithium niobate wafer, and then continue to deposit a layer of metal gold with a thickness of 100nm. Finally, acetone is used to dissolve the remaining photoresist and excess metal film.

[0051] The bottomless thin-walled liquid glass tank 3 has a width of 25mm and a length of 20mm, and is bonded to the middle of a pair of oblique electrodes on the lithium niobate wafer by colloi...

Embodiment 2

[0058] Such as Figure 6 , 7 As shown, the output signal B is set to be a dense arithmetic frequency superposition signal with the same linear change in the amplitude on both sides of the frequency from 18.9MHz to 28.3MHz, and there is no phase difference between the excitation signals of the same frequency applied to the two oblique finger transducers. Signal generator, after the microarray structure is stabilized, use UV curing lamp 5 to cure, and the outline schematic diagram of the obtained microarray structure is as follows Figure 8 shown.

[0059] The frequencies from 18.9MHz to 28.3MHz correspond to the places where the width and the gap are larger to the places where the width and the gap are smaller on the oblique finger electrode 2, respectively, and the start and end of the specific positions are as follows Figure 7 and Figure 8 hint.

Embodiment 3

[0061] Such as Figure 9 , 10 As shown, the output signal C is set to be a dense arithmetic frequency superposition signal with the same linear change in the amplitude on both sides of the frequency from 14.1MHz to 28.3MHz. The phase difference of the same frequency excitation signals applied to the two oblique finger transducers is as follows Figure 9 As shown, the four stages of phase difference do the linear change of the broken line in the figure, start the signal generator, and after the microarray structure is stable, use the UV curing lamp 5 to cure. The obtained microarray structure outline schematic diagram is as follows Figure 11 shown.

[0062] The frequencies from 14.1MHz to 28.3MHz correspond to the places where the width and the gap are larger to the places where the width and the gap are smaller on the oblique finger electrode 2 respectively, and the start and end of the specific positions are as follows Figure 10 and Figure 11 hint.

[0063] This example ...

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Abstract

The invention discloses an oblique interdigital transducer-based preparation device and method for a variable-spacing microstructure. A lithium niobate wafer is provided with a pair of oblique interdigital electrodes, and a glass liquid tank is arranged in the center of the lithium niobate wafer; liquid photosensitive prepolymer is arranged in the glass liquid tank; an ultraviolet (UV) curing lampis arranged below the lithium niobate wafer; excitation signals variable in amplitude, having phase difference and variable in phase difference are applied to the two oblique interdigital electrodes,and surface acoustic waves generated by the excitation signals at the two sides are superposed to the liquid photosensitive prepolymer to form the adjustable variable-spacing microarray structure variable in peak valley height / peak line and valley line, and the liquid photosensitive prepolymer is cured by UV irradiation. The preparation device and the method can rapidly manufacture the microarraystructure in an adjustable and controllable manner, and have the characteristics that operation is simple, the production efficiency is high, the structure is adjustable and controllable, and the like.

Description

technical field [0001] The invention relates to a micro-forming method and a forming device, in particular to a preparation device and method of a variable-pitch microstructure based on an oblique finger transducer. Background technique [0002] Patterned microarray structure forming method and process is an important research topic in the field of micromanufacturing, and has a wide range of applications in biomedicine, aerospace, electronic information and other fields. The patterned microarray structure can be used for chemical substance detection, drug screening, etc., so that the chemical reaction is in a controlled microenvironment to ensure the specificity of the reaction; in addition, the surface microarray morphology can produce a large Friction is therefore suitable for the outer layer of small components in general, such as the outer layer of bionic skin. [0003] At present, the fabrication of patterned microarray structures can be mainly divided into mold formin...

Claims

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Application Information

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IPC IPC(8): B29C64/124B29C64/307B29C64/321B33Y30/00B33Y40/00H03B5/32H03H9/02
CPCB29C64/124B29C64/307B29C64/321B33Y30/00B33Y40/00H03B5/326H03H9/02559
Inventor 汪延成许诚瑶梅德庆
Owner ZHEJIANG UNIV
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