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Organic thin film transistor and preparation method thereof and display device

An organic thin film and transistor technology, applied in the fields of organic thin film transistors and their preparation methods and display devices, can solve the problems of poor mechanical/thermal stability and mismatch of mechanical/thermal stability, etc., to reduce thermal expansion coefficient and avoid transfer failure Complete, improve the effect of electrical contact and service life

Active Publication Date: 2020-02-07
XI'AN UNIVERSITY OF ARCHITECTURE AND TECHNOLOGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] Aiming at the technical problems existing in the prior art, the present invention provides an organic thin film transistor and its preparation method to solve the problem of poor mechanical / thermal stability of the existing polymer template and the gap between the polymer template and the corresponding transfer layer. The technical problem of the mismatch of mechanical / thermal stability performance in order to realize the efficient and accurate transfer of organic thin film transistors to flexible substrates

Method used

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  • Organic thin film transistor and preparation method thereof and display device
  • Organic thin film transistor and preparation method thereof and display device
  • Organic thin film transistor and preparation method thereof and display device

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preparation example Construction

[0035] The invention provides a method for preparing an organic thin film transistor, wherein a sufficient amount of nanoparticles is filled on the surface of a source / drain mold and a grid mold respectively to obtain a source / drain mold and a grid mold filled with nanoparticles; The surface of the source / drain mold and the gate mold with nanoparticles is poured with a polymer solution. After curing, the mold is turned over to transfer the nanoparticles with the polymer to obtain a source / drain template and a gate template; using sputtering technology, the Prepare the source / drain metal layer on the source / drain template, prepare the gate metal layer on the surface of the gate template; transfer the source / drain metal layer to the flexible substrate with the organic semiconductor layer by hot embossing method , to form a flexible substrate for transferring the active / drain metal layer; use spin coating method to prepare an insulating layer on the transferred source / drain metal ...

Embodiment 1

[0052] Embodiment 1 provides a method for preparing an organic thin film transistor, comprising the following steps:

[0053] Step 1. Select a highly doped silicon wafer as a hard substrate, and use etching technology to etch a micron source / drain array structure on a highly doped silicon wafer to obtain a source / drain mold; a micron source / drain array structure The size characteristics are: length × width × depth = 50 × 30 × 25μm;

[0054] Select a highly doped silicon wafer as a hard substrate, and use etching technology to etch a micron grid array structure on a highly doped silicon wafer to obtain a gate mold; the size characteristics of the micron grid array structure are: length × width × depth =12×40×25μm;

[0055] Step 2. Ultrasonic cleaning the source / drain mold or gate mold in step 1 with acetone, ethanol and deionized water in sequence, and drying with nitrogen to make the surface clean;

[0056] Step 3. Fill a sufficient amount of silicon dioxide nanoparticles on...

Embodiment 2

[0069] Embodiment 2 provides a method for preparing an organic thin film transistor, comprising the following steps:

[0070] Step 1. Select a highly doped silicon wafer as a hard substrate, and use etching technology to etch a micron source / drain array structure on a highly doped silicon wafer to obtain a source / drain mold; a micron source / drain array structure The size characteristics are: length × width × depth = 8 × 5 × 1μm;

[0071] Select a highly doped silicon wafer as a hard substrate, and use etching technology to etch a micron grid array structure on a highly doped silicon wafer to obtain a gate mold; the size characteristics of the micron grid array structure are: length × width × depth =3×8×1 μm;

[0072] Step 2. Ultrasonic cleaning the source / drain mold or gate mold in step 1 with acetone, ethanol and deionized water in sequence, and drying with nitrogen to make the surface clean;

[0073] Step 3. Fill a sufficient amount of titanium dioxide nanoparticles on the...

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Abstract

The invention discloses an organic thin film transistor and a preparation method thereof and a display device. The method comprises the following steps: pouring a polymer solution on a source / drain mold and a gate mold which are filled with nano particles, and turning the molds over after curing to obtain a source / drain template and a gate template; preparing metal layers on the surfaces of the source / drain template and the gate template; transferring the source / drain metal layer to a flexible substrate, and preparing an insulating layer on the metal layer of the flexible substrate; aligning the gate metal layer with the flexible substrate provided with the insulating layer; and transfer-printing the gate metal layer on the insulating layer of the flexible substrate to obtain the organic thin film transistor. According to the invention, the Young modulus of the polymer template is improved and the coefficient of thermal expansion of the polymer template is reduced by increasing the content of nanoparticles in the source / drain (or gate) of the polymer template organic thin film transistor, mechanical deformation and thermal deformation of the polymer template in the transfer printing process are limited, efficient and accurate transfer printing of the organic thin film transistor is realized, and therefore, an organic thin film transistor device with good electrical contact is produced.

Description

technical field [0001] The invention belongs to the technical field of semiconductor fabrication, and in particular relates to an organic thin film transistor, a preparation method thereof, and a display device. Background technique [0002] Organic thin film transistors can be used in mobile phone flexible screens, flexible microelectronic circuits, wearable sensors and other fields. Polymer templates with excellent mechanical / thermal properties have attracted much attention in organic thin film transistor transfer printing technology; existing polymer templates have Low Young's modulus and high thermal expansion coefficient lead to poor mechanical and thermal stability, which directly affect the alignment accuracy and transfer quality of organic thin film transistors. [0003] At present, the traditional method to improve the mechanical / thermal stability of polymer templates is to directly dope nanoparticles in polymers. However, the dispersion of nanoparticles in polymers...

Claims

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Application Information

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IPC IPC(8): H01L51/40H01L51/05B82Y30/00
CPCB82Y30/00H10K71/18H10K10/464
Inventor 叶向东田波
Owner XI'AN UNIVERSITY OF ARCHITECTURE AND TECHNOLOGY
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