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Method for preparing selective gas-permeable membrane coated with metal organic frame and application thereof

A metal-organic framework, selective technology, used in measurement devices, instruments, material analysis by electromagnetic means, etc., can solve the problems of poor measurement accuracy, cross-sensitivity, etc., to improve accuracy, reduce package size, and reduce costs. Effect

Active Publication Date: 2020-02-18
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] Aiming at the problem of cross-sensitivity in semiconductor gas sensors in the prior art, resulting in poor measurement accuracy, the present invention provides a method for preparing a selective gas-permeable membrane coated with a metal-organic framework and its application to improve the performance of semiconductor gas sensors. Discrimination ability for mixed gas

Method used

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  • Method for preparing selective gas-permeable membrane coated with metal organic frame and application thereof
  • Method for preparing selective gas-permeable membrane coated with metal organic frame and application thereof
  • Method for preparing selective gas-permeable membrane coated with metal organic frame and application thereof

Examples

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Embodiment 1

[0046] A preparation method of a selective gas-permeable membrane coated with a metal-organic framework. First, a layer of zinc oxide is grown on the surface of the waterproof gas-permeable membrane by magnetron sputtering at a power of 120W for 2 hours. Then, add 1g of 2-methylimidazole and 20ml of methanol into the reaction kettle to make a solution, and then place the waterproof and breathable membrane with zinc oxide film in the reaction kettle with the solution, and hydrothermally react at 120°C 12h, ZIF-8 was synthesized in situ on the surface of the gas-permeable membrane by the hydrothermal method, so that a layer of dense ZIF-8 film was grown on the surface of the waterproof gas-permeable membrane, and the ZIF-8 film could improve the CO X Gas selectivity.

Embodiment 2

[0048] A preparation method of a selective gas-permeable membrane coated with a metal-organic framework. First, a layer of cobalt oxide is grown on the surface of the waterproof gas-permeable membrane by magnetron sputtering at a power of 20W for 3 hours. Then, add 20ml of 2-methylimidazole solution in the reaction kettle, the concentration of the solution is 0.1mmol / L, the solvent is ethanol, and then the waterproof and breathable membrane with the cobalt oxide film is placed in the reaction kettle with the solution In 24 hours of hydrothermal reaction at 10°C, ZIF-67 was synthesized in situ on the surface of the gas-permeable membrane by the hydrothermal method, so that a dense layer of ZIF-67 film grew on the surface of the waterproof and gas-permeable membrane. The ZIF-67 film can improve the NO X Gas selectivity.

Embodiment 3

[0050] A kind of preparation method of the porous membrane coated with metal organic framework, at first, on the surface of waterproof gas-permeable membrane by magnetron sputtering method, sputtering 30min under the power of 150W, makes the surface of waterproof gas-permeable membrane grow a layer of copper oxide thin film; Then , add 0.5mmol of 1,3,5-benzoic acid (H 3 BTC), 10ml of ethanol and 5ml of DMF to make a mixed solution, then put the waterproof breathable membrane with copper oxide film in the reaction kettle with the solution, and conduct a hydrothermal reaction at 150°C for 10min. Cu-BTC is synthesized in situ on the surface, so that a dense Cu-BTC film grows on the surface of the waterproof and breathable membrane, and the Cu-BTC film can improve the selectivity for ammonia.

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Abstract

The present invention discloses a method for preparing a selective gas-permeable membrane coated with a metal organic frame and application thereof. The selective gas-permeable membrane coated with the MOF covers, in a sealing manner, the top of a tube that contains a gas sensor, so that selectivity of the gas sensor for gases is implemented, and gas detection accuracy is improved. In addition, gas sensors for detecting different gases can be placed in different chambers of the tube that contains the gas sensors. MOF thin films corresponding to different chambers are different, so that mixturegases selectively pass, thereby improving selectivity of the gas sensors for detected gases. An electrode of the gas sensor is connected to a conductive contact in the tube through lead bonding, so that an electrical signal of the gas sensor is transmitted to an external circuit, packaging of the gas sensor is facilitated, package dimensions are reduced, and costs are lowered.

Description

technical field [0001] The invention belongs to the technical field of packaging of electronic devices, and in particular relates to a preparation method and application of a selective gas permeable membrane coated with a metal organic framework. Background technique [0002] With the rapid development of industrialization, the problem of environmental pollution is becoming more and more serious. At the same time, with the improvement of people's living standards and the increasing emphasis on environmental protection, the detection of various toxic and harmful Higher requirements are put forward for the monitoring of food and the detection of the quality of the living environment. Gas sensors, as one of the sensory or signal input parts, are becoming more and more widely used in industrial detection, home life, food storage, medical and health and other fields. Applications. [0003] At present, there are many kinds of gas sensors, which can be roughly divided into semicon...

Claims

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Application Information

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IPC IPC(8): G01N27/12C08G83/00
CPCC08G83/008G01N27/126
Inventor 刘卫华卜祥瑞马发吴海洋李昕王小力
Owner XI AN JIAOTONG UNIV
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