Method for manufacturing glass-based buried spot-size converter through temperature gradient ion diffusion of grooved hot plate

Abstract

The invention discloses a method for manufacturing a glass-based buried spot-size converter through temperature gradient ion diffusion of a grooved hot plate. The method comprises two links: in the first link, a buried strip-shaped ion doped region (8) is manufactured on the surface of a glass substrate (1) by using an ion exchange method; and in the second link, the glass substrate (1) is vertically placed in a groove in the grooved hot plate (5) for gradient temperature ion diffusion. Such a method is characterized in that: the method is characterized in that: the glass substrate (1) with the buried strip-shaped ion doped region (8) manufactured below the surface is vertically placed in the groove in the horizontal grooved hot plate (5) for gradient temperature ion diffusion; the temperature gradient in the glass substrate (1) in the length direction of the buried strip-shaped ion doped region (8) is utilized; the gradient of the diffusion rate of doped ions is generated in the glasssubstrate (1) in the length direction of the buried strip-shaped ion doped region (8), the size of the cross section of the buried strip-shaped ion doped region (8) below the surface of the glass substrate (1) close to one end of the grooved hot plate (5) is increased, and the buried strip-shaped ion doped region (8) is changed into a buried conical ion doped region (9). The consistency of the size of the cross section of the buried conical ion doped region (9) in two axial directions is improved, so that the matching degree of the shape and the size of the cross section of the spot-size converter and the cross section of the optical fiber core part is improved, and the insertion loss of a device is reduced.

Description

technical field [0001] The invention relates to the fields of optical devices and integrated optics, in particular to a method for manufacturing a glass-based buried mode spot converter by temperature gradient ion diffusion on a grooved hot plate. Background technique [0002] In 1969, S.E.Miller proposed the concept of integrated optics. The basic idea is to make optical waveguides on the surface of the same substrate (or substrate), and based on this, realize the integration of various devices such as light sources, couplers, and filters. Integrated production. Through this integration, the miniaturization, weight reduction, and stabilization of the optical system can be realized, and the performance of the device can be improved. [0003] The integrated optical device manufactured on the glass substrate (1) by ion exchange technology has always been valued by business circles and researchers. Glass-based integrated optical waveguide devices based on ion exchange technol...

AI Technical Summary

Problems solved by technology

Therefore, due to the large difference in the shape of the waveguide cross-section of this mode converter in the two axial directions, the application of this mode converter in integrated optical devices is limited, for example, for the realization of single-mode optical fiber When coupled with multimode fiber, the insertion loss of this device is above 6.5dB

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