A radiofrequency particle source

Abstract

The present invention relates to the technical field of particle beam generation and neutralization, and specifically provides a radio frequency particle source, including: a radio frequency signal source, an impedance matching network, a radio frequency coil, a radio frequency discharge chamber and a grid system, wherein the grid system includes an inner grid net and the outer grid; by adjusting the voltage of the inner grid and the outer grid, the generation of ion beams, electron beams, or electron beams and ion beams can be simultaneously generated and neutralized to form neutral particle beams; at the same time, by adjusting The grid distance and the grid electrode voltage control the positive and negative charge density of the extracted beam and the moving speed of the particles so as to realize the adjustable beam particle density, speed and charge. In addition, the present invention does not need the external cathode and corresponding electrodes used by traditional ion sources to neutralize the particle beam, which greatly reduces the complexity of radio frequency ion source equipment, avoids the impact of high temperature of the cathode and sputtering on the life of the ion source, and ensures that the beam Flow produces the stability of the effect.

Description

technical field [0001] The invention relates to the technical field of particle beam generation and neutralization, and more specifically, to a radio frequency particle source. Background technique [0002] Radio frequency plasma uses radio frequency energy to generate displacement current to ionize gas to form plasma. Conventional RF ion sources generate an RF plasma and extract a beam of ions from the ionized plasma. Radio frequency ion sources are widely used in material coating, nuclear fusion, aviation propulsion and other fields. The radio frequency ion source neutralizer emits electrons to the ion source beam, neutralizes the charge of the ion beam, and avoids the accumulation of the beam charge. It is an important component of the radio frequency ion source. [0003] The traditional radio frequency ion source neutralizer uses a hot cathode with an external electrode to emit electrons. In order to overcome the work function of the electrons, the cathode often needs ...

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Problems solved by technology

[0003] The traditional radio frequency ion source neutralizer uses a hot cathode with an external electrode to emit electrons. In order to overcome the work function of the electrons, the cathode often needs a high working temperature. High temperature will increase the heat loss of the cathode and reduce the emission efficiency. bombardment, the temperature of the cathode will further increase; at the same time, the life of the tungsten wire cathode used in plasma processing is only about 200 hours, and the life of the cathode also greatly affects the life of the plasma source

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