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A radiofrequency particle source

A particle source and radio frequency signal source technology, applied in the field of radio frequency particle sources, can solve the problems of affecting the life of the plasma source, increasing the heat loss of the cathode, and increasing the temperature of the cathode, so as to enhance the working stability and service life and reduce energy loss , Improve the effect of heat resistance and mechanical properties

Active Publication Date: 2021-12-03
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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Problems solved by technology

[0003] The traditional radio frequency ion source neutralizer uses a hot cathode with an external electrode to emit electrons. In order to overcome the work function of the electrons, the cathode often needs a high working temperature. High temperature will increase the heat loss of the cathode and reduce the emission efficiency. bombardment, the temperature of the cathode will further increase; at the same time, the life of the tungsten wire cathode used in plasma processing is only about 200 hours, and the life of the cathode also greatly affects the life of the plasma source

Method used

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  • A radiofrequency particle source
  • A radiofrequency particle source
  • A radiofrequency particle source

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Embodiment Construction

[0022] The present invention will be further described below in conjunction with specific embodiments, wherein, the accompanying drawings are only for exemplary illustrations, and what is shown is only a schematic diagram rather than a physical map, and cannot be interpreted as a limitation to this patent; in order to better illustrate the implementation of the present invention For example, some components in the drawings may be omitted, enlarged or reduced, and do not represent the actual size; for those skilled in the art, it is understandable that some known structures and their descriptions in the drawings may be omitted.

[0023] This embodiment provides a kind of non-neutralization radio frequency particle source, its structural diagram is as follows figure 1 shown, where:

[0024] The preferred material of the radio frequency discharge chamber 110 is: boron nitride ceramics, the bottom of the radio frequency discharge chamber 110 is provided with an air inlet 111, and ...

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Abstract

The present invention relates to the technical field of particle beam generation and neutralization, and specifically provides a radio frequency particle source, including: a radio frequency signal source, an impedance matching network, a radio frequency coil, a radio frequency discharge chamber and a grid system, wherein the grid system includes an inner grid net and the outer grid; by adjusting the voltage of the inner grid and the outer grid, the generation of ion beams, electron beams, or electron beams and ion beams can be simultaneously generated and neutralized to form neutral particle beams; at the same time, by adjusting The grid distance and the grid electrode voltage control the positive and negative charge density of the extracted beam and the moving speed of the particles so as to realize the adjustable beam particle density, speed and charge. In addition, the present invention does not need the external cathode and corresponding electrodes used by traditional ion sources to neutralize the particle beam, which greatly reduces the complexity of radio frequency ion source equipment, avoids the impact of high temperature of the cathode and sputtering on the life of the ion source, and ensures that the beam Flow produces the stability of the effect.

Description

technical field [0001] The invention relates to the technical field of particle beam generation and neutralization, and more specifically, to a radio frequency particle source. Background technique [0002] Radio frequency plasma uses radio frequency energy to generate displacement current to ionize gas to form plasma. Conventional RF ion sources generate an RF plasma and extract a beam of ions from the ionized plasma. Radio frequency ion sources are widely used in material coating, nuclear fusion, aviation propulsion and other fields. The radio frequency ion source neutralizer emits electrons to the ion source beam, neutralizes the charge of the ion beam, and avoids the accumulation of the beam charge. It is an important component of the radio frequency ion source. [0003] The traditional radio frequency ion source neutralizer uses a hot cathode with an external electrode to emit electrons. In order to overcome the work function of the electrons, the cathode often needs ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H05H1/46H01J27/18
CPCH01J27/18H05H1/46H05H1/4645
Inventor 袁学松朱昀泽鄢扬傅文杰李海龙王彬蒙林
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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