Photosensitive resin composition, dry film resist and corresponding element
A technology of photosensitive resin and composition, which is applied in the field of photosensitive resin composition, dry film resist and corresponding components, and can solve problems such as inability to realize weak alkaline development, unfavorable large-scale production, lack of tin plating resistance, etc. Achieving good capping ability and high resolution, good stripping properties, and improving production yield
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[0053] Alkali-soluble resin A-1: acrylic acid / methacrylic acid / methyl methacrylate / butyl acrylate / styrene=6 / 18 / 45 / 20 / 11 (weight ratio) ( M w =80000).
[0054] Alkali-soluble resin A-2: methacrylic acid / methyl methacrylate / butyl acrylate / styrene=24 / 45 / 15 / 14 (weight ratio) ( M w =101000).
[0055] Alkali-soluble resin A-3: methacrylic acid / methyl methacrylate / butyl acrylate / styrene=25 / 57 / 15 / 5 (weight ratio) ( M w =119300).
[0056] Prepare the following photopolymerizable monomers:
[0057] B-1: In the above general formula (I), R1 is H, R2 is H, o+n=6, p+m=30 (average) compound (Guangzhou Sartomer, PRO31627)
[0058] B-2: In the above general formula (I), R1 is CH 3 , R2 is CH 3 , o+n=2, p+m=24 (mean value) compound (Nippon Oil & Fat, blemmer PDBPE series)
[0059] B-3: In the above general formula (I), R1 is CH 3 , R2 is CH 3 , o+n=12, p+m=6 (average) compound (National Fine Chemicals)
[0060] B-4: Ethoxylated (30) bisphenol A dimethacrylate (Meiyuan 2301) ...
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