A preparation method of ar diffractive optical waveguide imprint mold, soft mold and application

A technology of diffracted light and soft mold, applied in manufacturing tools, heat treatment equipment, furnaces, etc., can solve the problems of difficult to achieve high-efficiency and low-cost preparation of large-area inclined grating imprinting molds, high cost and complex process steps, etc. The effect of precision, low cost, rapid manufacturing, low production cost and simple process

Active Publication Date: 2022-04-08
QINGDAO TECHNOLOGICAL UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although LIGA technology has outstanding advantages, its process steps are relatively complicated and the cost is expensive.
In order to obtain the light source, a complex and expensive high-energy X-ray source - a synchrocyclotron - is required, as well as a photolithographic mask
The photolithographic mask itself is a microstructure, which needs to be prepared by ion beam lithography and other technologies, which is time-consuming and complicated, and there are few types of photoresists available, which makes it difficult for LIGA technology to imprint large-area inclined gratings with arbitrary shapes. Efficient and low-cost preparation of molds

Method used

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  • A preparation method of ar diffractive optical waveguide imprint mold, soft mold and application
  • A preparation method of ar diffractive optical waveguide imprint mold, soft mold and application
  • A preparation method of ar diffractive optical waveguide imprint mold, soft mold and application

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Embodiment

[0064] figure 1 It is a schematic diagram of an electroforming mask to be manufactured by the present invention and the specific parameters of the diffractive optical waveguide (surface relief oblique grating) that it can manufacture, wherein inclination angle, groove depth (relative depth), line width, fill factor (grating width / period) such as figure 1 mentioned. The parameters of the metal mold to be manufactured in this implementation example: the inclination angle is 35°; the groove depth is 330nm; the line width is 220nm, the period is 405nm, and the filling factor (coefficient) is 55%. A photoresist 2 is provided on the surface of the nickel plate 1 .

[0065] Taking the tilted grating nanoimprint mold described in the implementation example as an example, combined with Figure 1-Figure 6 , specifically explain the specific process of manufacturing tilted grating nanoimprint mold based on the proposed method and equipment.

[0066] Step 1: Print the electroforming ...

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Abstract

The invention relates to a preparation method of an AR diffraction optical waveguide embossing mold, a soft mold and an application. The specific steps are: use a two-photon polymerization micro-nano 3D printer to print an electroforming mask on a nickel substrate; use nanosecond pulse micro-electroforming to electroform the obtained nickel substrate with a mask to obtain a tilted grating metal nickel mold ;Using the manufactured inclined grating metal nickel mold as the master mold, coating the graphic layer polymer PDMS on the master mold, pasting PET on the PDMS, embossing the mold, and adopting the peel-off type to obtain a one-time copy For the soft mold, repeat the steps of coating PDMS, sticking PET, embossing, and peeling off the mold, and finally make a composite soft mold in which several PDMS soft mold arrays are arranged on a PET. Realize high-precision, low-cost and high-efficiency manufacturing of large-area AR diffractive optical waveguide imprinting molds.

Description

technical field [0001] The invention belongs to the technical field of augmented reality AR and micro-nano manufacturing, and specifically relates to a method for preparing an AR diffractive optical waveguide embossing mold, a soft mold and its application. Background technique [0002] The information disclosed in this background section is only intended to increase the understanding of the general background of the present invention, and is not necessarily taken as an acknowledgment or any form of suggestion that the information constitutes the prior art already known to those skilled in the art. [0003] Augmented Reality (AR for short) is a new technology that ingeniously integrates virtual information with the real world. It can use one or a group of optical couplers to integrate the virtual information and the real scene through the "superposition" method after the virtual information simulation, and the two kinds of information complement each other, thereby realizing...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B29C33/38C25D1/10C22F1/10C21D9/00
CPCB29C33/3842C25D1/10C22F1/10C21D9/0068
Inventor 郭鹏飞张厚超兰红波
Owner QINGDAO TECHNOLOGICAL UNIVERSITY
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