Metal/ceramic/metal symmetric gradient structure sealing insulating material and preparation method thereof

Pending Publication Date: 2021-01-05
WUHAN UNIV OF TECH
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  • Abstract
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  • Application Information

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Problems solved by technology

The surface metallization of nitride ceramics prepared based on traditional technology will have an obvious ceramic/metal phase interface, which cannot achieve long-term sealin

Method used

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  • Metal/ceramic/metal symmetric gradient structure sealing insulating material and preparation method thereof
  • Metal/ceramic/metal symmetric gradient structure sealing insulating material and preparation method thereof
  • Metal/ceramic/metal symmetric gradient structure sealing insulating material and preparation method thereof

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Example Embodiment

[0037]The invention relates to a metal / ceramic / metal symmetrical gradient structure sealing insulating material and a preparation method thereof. Among them, the ceramic materials are mainly nitride ceramics, including one or more of AlN, Si3N4, and BN. Metal materials include two types, one of high melting point metals W and Mo, and one of good additivity expansion alloy (4J33 alloy), Kovar alloy (4J29 alloy) and stainless steel 304 (SUS304). The preparation method of the material includes two stages: the first stage is to mix the ceramic and metal powder uniformly according to the proportions of each group, and the layer-by-layer stacking is designed according to the gradient structure and the hot-press co-firing technology is combined to obtain the metal / ceramic / metal gradient composite material; In the stage, welding technology is used to connect dissimilar metals to the metal sides at both ends of the composite material, combined with mechanical drilling, and finally obtain a h...

Example Embodiment

[0039]Example 1

[0040]A metal / ceramic / metal symmetrical gradient structure sealing insulation material, the structure diagram is as followsfigure 1 As shown, the specific steps of the preparation method are as follows:

[0041]Use appropriate amount of AlN ceramic powder and Mo powder to prepare the gradient intermediate layer 2 raw materials, according to the mass percentage of AlN ceramic powder and Mo powder as 1:9, 2:8, 3:7, 4:6, 5:5, 6:4, 7 :3,8:2, 9:1 ratios to prepare 9 parts of mixed powder, each part of mixed powder 0.5g, after ball milling, as the raw material for each layer of the gradient middle layer 2 for use.

[0042]The high melting point metal layer 3 (Mo, the amount of 4g), the gradient intermediate layer 2, the nitride ceramic layer 1 (AlN ceramic powder, the amount of 2g), the gradient intermediate layer 2, the high melting point metal layer 3 (Mo, the amount of 4g) ) Of the raw material powder according tofigure 1 The structure shown is sequentially stacked into a grap...

Example Embodiment

[0046]Example 2

[0047]A metal / ceramic / metal symmetrical gradient structure sealing insulating material, and the specific steps of the preparation method are as follows:

[0048]Use appropriate amount of AlN ceramic powder and Mo powder to prepare the gradient intermediate layer 2 raw materials, and prepare 5 parts according to the ratio of AlN ceramic powder and Mo powder mass percentage of 1:9, 3:7, 5:5, 7:3, 9:1 The mixed powder, 1g of each mixed powder, is used as the raw material for each layer of the gradient intermediate layer 2 after ball milling.

[0049]The high melting point metal layer 3 (Mo, the amount of 4g), the gradient intermediate layer 2, the nitride ceramic layer 1 (AlN ceramic powder, the amount of 2g), the gradient intermediate layer 2, the high melting point metal layer 3 (Mo, the amount of 4g) ) Of the raw material powder according tofigure 1 The structure shown is sequentially stacked into a graphite mold with an inner diameter of 25 mm. The raw materials of each la...

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Abstract

The invention relates to a metal/ceramic/metal symmetric gradient structure sealing insulating material and a preparation method thereof. The sealing insulating material comprises a high-machinabilitymetal layer (4), a high-melting-point metal layer (3), a gradient middle layer (2), a nitride ceramic layer (1), a gradient middle layer (2), a high-melting-point metal layer (3) and a high-machinability metal layer (4) from top to bottom in the thickness direction, wherein the gradient middle layer (2) is obtained by sintering high-melting-point metal powder and nitride ceramic powder; the content of high-melting-point metal in the gradient middle layer (2) is distributed in a gradient mode, and is gradually reduced in the direction from the high-melting-point metal layer (3) to the nitrideceramic layer (1); and the mass fraction is reduced to 0-10% from 90-100%. The sealing insulating material provided by the invention has very high designability, is suitable for extremely complex working environments such as long-time high temperature and strong corrosion, and has relatively high high-temperature stability, corrosion resistance and insulating sealing performance.

Description

technical field [0001] The invention belongs to the technical field of sealing materials, and in particular relates to a metal / ceramic / metal symmetric gradient structure sealing insulating material and a preparation method thereof. Background technique [0002] Nitride ceramics have been widely used in structural materials, electronic packaging materials, and luminescent materials due to their excellent high thermal conductivity, high insulation resistance, strong corrosion resistance, low dielectric constant, and thermal expansion coefficient similar to silicon. Whether it is used as a substrate, package or high-temperature sealing material, it involves the problem of ceramic surface metallization or metal sealing. However, as a compound with strong covalent bonds, nitride ceramics are difficult to wet with metals at high temperatures, and it is quite difficult to implement metallization. At present, the surface metallization methods of nitride ceramics that have been deve...

Claims

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Application Information

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IPC IPC(8): B22F7/04B22F3/14B22F3/16B22F5/10F16J15/00
CPCB22F7/04B22F3/14B22F3/162B22F5/106F16J15/00B22F2007/042B22F2999/00
Inventor 陈斐贾明勇刘洋古星沈强张联盟
Owner WUHAN UNIV OF TECH
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