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Superconducting nanowire single-photon detector

A single-photon detector, superconducting nanowire technology, applied in nanotechnology, nanotechnology, nanotechnology for materials and surface science, etc., can solve the problem that fractal SNSPDs are difficult to achieve internal quantum efficiency, limit the detection efficiency of fractal SNSPDs, SNSPD absorption efficiency reduction and other problems, to achieve the effect of weakening the current crowding effect, improving the internal quantum efficiency, optimizing the internal quantum efficiency and absorption efficiency

Active Publication Date: 2021-02-09
TIANJIN UNIV
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Problems solved by technology

[0004] Although the current crowding effect is weakened by reducing the duty cycle of the fractal nanowires, thereby improving the internal quantum efficiency, the current crowding effect of the fractal nanowires is much more serious than that of the zigzag nanowires under the same duty cycle, making it difficult for fractal SNSPDs. Achieve more saturated internal quantum efficiency and smaller time domain jitter
In addition, the reported fractal SNSPDs all adopt the Fabry-Perot optical cavity structure, and the absorption efficiency of SNSPDs is significantly reduced under the condition of low duty cycle nanowires.
The detection efficiency of SNSPD is the coupling efficiency of the incident light field and the photosensitive area of ​​SNSPD, the absorption efficiency of the photosensitive area of ​​SNSPD to the incident light, and the product of internal quantum efficiency of SNSPD, and the fractal SNSPD with integrated Fabry-Perot optical cavity There is a mutually restrictive relationship between the absorption efficiency and the internal quantum efficiency. Therefore, this restrictive relationship limits the detection efficiency of the fractal SNSPD

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Embodiment 1

[0038] A superconducting nanowire single photon detector, see Figure 1-Figure 5 , the embodiment of the present invention designs the SNSPD as a curved fractal nanowire structure, which is used to alleviate the current crowding effect, improve the internal quantum efficiency and realize the polarization insensitivity of the detection efficiency; on the other hand, further weaken the The current crowding effect, while designing the optical structure and optimizing the absorption efficiency for the curved fractal nanowire with optimized duty cycle, realizes the simultaneous optimization of the absorption efficiency and internal quantum efficiency of the curved fractal SNSPD.

[0039] Specifically, the technical solution can be divided into two parts: (1) design and simulation of curved fractal nanowire structure; (2) design and simulation of optical cavity structure.

[0040] (1) Design and simulation of curved fractal nanowire structure

[0041] The curved fractal nanowires c...

Embodiment 2

[0055] The scheme in embodiment 1 is further introduced below in conjunction with specific examples, see the following description for details:

[0056] 1. Device processing

[0057] Here, taking the normal incidence mirror DBR cavity and the curved fractal nanowire with a line width of 40 nanometers as an example, firstly, using the ion beam assisted sputtering technology, 6 pairs of 264nm / 181nm thick bismuth nanowires with a thickness of 264nm / 181nm were sequentially sputtered on a silicon substrate. Silicon oxide (SiO 2 ) / tantalum pentoxide (Ta 2 o 5 ) layer to realize the preparation of the lower distributed Bragg reflector. Defect layer 2 is processed by ion beam assisted sputtering technology, and the material is SiO 2 . After preparing a titanium niobium nitride film on the defect layer 2 by magnetron sputtering, a gold electrode is prepared by photolithography, magnetron sputtering or electron beam evaporation, followed by scanning electron beam exposure and react...

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Abstract

The invention discloses a superconducting nanowire single-photon detector. The detector comprises a bent fractal nanowire structure and an optical cavity structure; the bent fractal nanowire structureis used for relieving the current crowding effect and achieving the effect that the detection efficiency is insensitive to the polarization state of incident photons, and the bent fractal nanowire structure comprises parallel bent fractal nanowires and series bent fractal nanowires; and the optical cavity structure is used for realizing simultaneous optimization of internal quantum efficiency andabsorption efficiency. The detector can be widely applied to the fields of optical communication, single-photon imaging, fluorescence detection, quantum optics and the like, and the development and progress of the fields can be remarkably promoted due to the excellent performance of the detector.

Description

technical field [0001] The invention relates to the field of optoelectronic devices, in particular to a superconducting nanowire single photon detector. Background technique [0002] Superconducting nanowire single photon detectors (SNSPDs) have developed rapidly in recent years, and their performance indicators have been continuously pushed to new heights. The Sae Woo Nam team of the National Institute of Standards and Technology in the United States achieved a detection efficiency of 98% in the 1550 nm band using molybdenum silicide superconducting materials in 2019 [Conference on Coherence and Quantum Optics, 2019, pp.W2B-2.]; in In 2017, Val Zwiller’s team at Delft University in the Netherlands achieved a detection efficiency of 92% in the 1310 nm band using titanium niobium nitride superconducting materials [APL Photonics,2017,2(11):111301.], Shanghai Microsystems, China Suo Youlixing's team achieved a detection efficiency of 98% in the 1590 nm band using niobium nitri...

Claims

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Application Information

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IPC IPC(8): G01J11/00B82Y30/00
CPCG01J11/00B82Y30/00Y02P70/50B82Y15/00B82Y20/00G01J2001/442G01J1/44
Inventor 胡小龙孟赟邹锴胡南许亮
Owner TIANJIN UNIV
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