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Electro-Fenton-auto-oxidation device for treating microelectronic wastewater and method thereof

A microelectronics and self-oxidation technology, applied in the field of water treatment, can solve the problems of low recycling rate and poor microelectronic wastewater treatment effect, and achieve the effects of reducing the production of iron sludge, reducing the dosage of iron sources, and reducing the concentration

Active Publication Date: 2021-05-28
TONGJI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the complex water quality characteristics, the current microelectronic wastewater generated in the chip manufacturing process has poor treatment effect and low reuse rate

Method used

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  • Electro-Fenton-auto-oxidation device for treating microelectronic wastewater and method thereof
  • Electro-Fenton-auto-oxidation device for treating microelectronic wastewater and method thereof
  • Electro-Fenton-auto-oxidation device for treating microelectronic wastewater and method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0032] Such as figure 1 As shown, a kind of electric Fenton-autooxidation device for processing microelectronic waste water provided by the present invention comprises a water inlet system 1, a reactor housing 2, a combined cathode 3 located in the reactor housing 2, The first anode 4, the second anode 5, the DC power supply 6 electrically connected to the combined cathode 3, the first anode 4 and the second anode 5, the aeration system 7 located at the bottom of the reactor shell 2, the water outlet system 8, According to H in the water 2 o 2 Concentration adjustment dosage of Fe 2+ Dosing system 9; the combined cathode 3 includes a membrane frame 3-1 and a stainless steel wire mesh cathode 3-2, and the membrane frame 3-1 is provided with a suction port 3-3 communicating with the inner chamber of the membrane frame 3-1, The suction port 3-3 is connected to the water outlet pipe 8-1 of the water outlet system 8;

[0033] The stainless steel wire mesh cathode 3-2 is arrange...

Embodiment 2

[0041] This embodiment provides the device provided in Embodiment 1 to treat the electric Fenton-autooxidation method of microelectronic wastewater, comprising the following steps:

[0042] 1) The microelectronic wastewater first enters the water inlet tank 1-1 through the water inlet pipe 1-2, and the flow meter 1-5 monitors the flow rate in the water inlet;

[0043] 2) detect H in the device by manual monitoring or a portable detector 2 o 2 Concentration, when influent H 2 o 2 When the concentration is too high, open the aeration system 7 and control the Fe 2+ Dosing system 9 dosing iron source, the H contained in the microelectronics wastewater 2 o 2 On the one hand, it can be removed through the decomposition reaction between the interface of the combined cathode 3, the first anode 4 and the second anode 5 and the decomposition reaction in the homogeneous system formed in the reactor shell 2, while the original H in the influent 2 o 2 Fe capable of interfacing with ...

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Abstract

The invention discloses an electro-Fenton-auto-oxidation device for treating microelectronic wastewater, the device comprises a water inlet system and a method thereof, a reactor shell, a combined cathode, an anode, a power supply, an aeration system, a water outlet system and a Fe<2+> adding system, and the combined cathode comprises a membrane frame and a stainless steel wire mesh. When the device disclosed by the invention is used for treating microelectronic wastewater, the working state of the aeration system and the feeding amount of Fe<2+> can be adjusted according to the concentration change of H2O2 in inlet water, so that high-efficiency decomposition of H2O2 is realized, and residual refractory organic matters in the wastewater are oxidized and removed by effectively utilizing strong oxidizing substances generated in the decomposition process; when the decomposition rate of H2O2 in a reaction system is too high and supply is insufficient, dissolved oxygen generates H2O2 on the surface of a cathode material through intermittent aeration, and H2O2 self-compensation is realized; according to the device and the treatment method, the decomposition of H2O2 in the microelectronic wastewater and the synchronous removal of refractory organic matters can be efficiently realized with low consumption.

Description

technical field [0001] The invention belongs to the technical field of water treatment, and in particular relates to an electric Fenton-autooxidation device and method for treating microelectronic waste water. Background technique [0002] The chip manufacturing process is complex and requires the use of a variety of chemical reagents. The wastewater produced has the characteristics of large water volume, many types of pollutants, and complex water quality characteristics. The wastewater discharged from the chip manufacturing process is generally divided into general acid-base wastewater (IWW), fluorine-containing wastewater (FWW), copper-containing wastewater (CuWW), grinding wastewater (SLW), ammonia-containing wastewater (AWW) and organic wastewater (OWW) according to different processes. ) six categories. Due to the complex water quality characteristics, the current microelectronic wastewater generated in the chip manufacturing process has poor treatment effect and low ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C02F1/461C02F103/34C02F101/10C02F101/30
CPCC02F1/46104C02F2103/346C02F2101/10C02F2101/30C02F2305/023C02F2209/40C02F2201/4617
Inventor 王志伟陈妹王雪野查文桂任乐辉蔡可钰
Owner TONGJI UNIV
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