Carbon/carbon composite material crucible with composite ceramic layer and preparation method of carbon/carbon composite material crucible
A technology of carbon composite materials and composite ceramics, which is applied in the field of thermal field components for single crystal silicon drawing furnaces, can solve the problems of softening and deformation of quartz crucibles, high cost of single crystal silicon, and high cost of raw materials, so as to reduce thermal expansion coefficient and reduce raw materials The effect of simple cost and preparation process
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Embodiment 1
[0045] Such as figure 1 As shown, a carbon / carbon composite material crucible with a composite ceramic layer of the present invention comprises a carbon / carbon composite material crucible base (11) and a composite ceramic layer (12) respectively attached to its inner surface, and its specific preparation The steps are as follows:
[0046] Step 1, preparation of carbon fiber preform
[0047] According to the shape and size requirements of the crucible, the preparation method of the conventional carbon fiber prefabricated body mat is used to alternately stack the non-weft cloth and the mesh layer, and then the density is 0.2g / cm by acupuncture. 3 carbon fiber prefabricated body;
[0048] Step 2, densification of carbon fiber preform
[0049] Using chemical vapor infiltration (CVI), using propylene as the gas source of chemical vapor deposition, the carbon fiber preform obtained in step 1 is densified to a density of 1.1 g / cm 3 carbon / carbon composites;
[0050] Step 3, Mach...
Embodiment 2
[0067] Step 1, preparation of carbon fiber preform
[0068] According to the shape and size requirements of the crucible, the preparation method of the conventional carbon fiber prefabricated body mat is used to alternately stack the non-weft cloth and the mesh layer, and then the density is 0.6g / cm by acupuncture. 3 carbon fiber prefabricated body;
[0069] Step 2, densification of carbon fiber preform
[0070] The carbon fiber prefabricated body is impregnated-cured and carbonized by impregnating furan resin, and then chemical vapor infiltration (CVI) is used, with propylene as the gas source of chemical vapor deposition, and the carbon fiber obtained in step 1 The preform is densified to a density of 1.4g / cm 3 carbon / carbon composites;
[0071] Step 3, Machining
[0072] The carbon / carbon composite material obtained in step 2 is mechanically polished to obtain a carbon / carbon composite material crucible with a surface roughness Ra of 0.8mm;
[0073] Step 4, preparation...
Embodiment 3
[0088] Step 1, preparation of carbon fiber preform
[0089] According to the shape and size requirements of the crucible, the preparation method of the conventional carbon fiber prefabricated body mat is used to alternately stack the non-weft cloth and the mesh layer, and then the density is 0.4g / cm by acupuncture. 3 carbon fiber prefabricated body;
[0090] Step 2, densification of carbon fiber preform
[0091] The carbon fiber prefabricated body is impregnated-cured and carbonized by impregnating furan resin, and then chemical vapor infiltration (CVI) is used, with propylene as the gas source of chemical vapor deposition, and the carbon fiber obtained in step 1 The preform is densified to a density of 1.25g / cm 3 carbon / carbon composites;
[0092] Step 3, Machining
[0093] The carbon / carbon composite material obtained in step 2 is mechanically polished to obtain a carbon / carbon composite material crucible with a surface roughness Ra of 0.5mm;
[0094] Step 4, preparatio...
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