Linear source device of CIGS flexible solar cell selenium source

Abstract

The invention relates to a linear source device of a CIGS flexible solar cell selenium source, and solves the following non-uniform coating problem which is specifically that a selenium source of a traditional CIGS co-evaporation method is a dotted selenium source, the selenium source is evaporated to the surface of a substrate in a dotted manner, Gaussian distribution is formed at a dotted nozzle, and the phenomenon of non-uniform transverse coating exists. The device comprises a cylindrical shell-shaped linear selenium source container, a linear selenium steam nozzle is formed in the side face of the linear selenium source container in the cylindrical normal direction, the linear selenium source container is connected with a box-shaped selenium source, selenium metal to be evaporated is contained in the interior of the box-shaped selenium source, the box-shaped selenium source is provided with a feeding port and a dotted spraying nozzle, and a heating source is arranged on a position, above the selenium metal, of the box-shaped selenium source. According to the linear source device, through the cylindrical shell-shaped linear selenium source container, the selenium steam linear source is formed, transverse diffusion after selenium steam output is reduced, the influence of box-shaped selenium source air supply fluctuation on selenium steam output is reduced, and the stability of selenium steam is improved; and meanwhile, secondary heating can be carried out in the linear selenium source container, so that the secondary excitation activity of the selenium source is enhanced.

Description

technical field [0001] The invention belongs to the field of solar cell production, and relates to CIGS solar cell production equipment, in particular to a linear source device for CIGS flexible solar cell selenium sources. Background technique [0002] Flexible solar cell sheet is to form solar photovoltaic material coating on flexible and rollable substrate. Copper indium gallium selenide (CIGS) thin-film battery is a solar photovoltaic material with high mass-to-power ratio and good stability, and is generally considered to be the most promising flexible solar battery material. The multi-element co-evaporation method is the most widely used CIGS coating method. The coating is completed in a vacuum environment, and copper, indium, gallium, and selenium are co-evaporated to form a polycrystalline coating on the surface of the substrate. [0003] In the CIGS co-evaporation process, the technical control of the selenium source is a key step. It is necessary to precisely cont...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to solve the problem that the selenium source of the traditional CIGS co-evaporation method is a point-shaped selenium source, and the coating from the selenium source to the substrate belongs to a point-shaped spout, and there is a Gaussian distribution. When the selenium source is diffused and mixed with other components, there is an uneven selenium evaporation area. Therefore, a linear source device for the selenium source of CIGS flexible solar cells is provided, which can convert the selenium source from a point source to a linear source, which improves the uniformity of the selenium source evaporation. At the same time, the invention also uses the linear source The transfer structure setting solves the problem of large-scale and sustainable production of selenium sources

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