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Low-voltage driving ink-jet printing flexible synaptic transistor and preparation method thereof

An inkjet printing, low-voltage drive technology, applied in the direction of transistors, semiconductor/solid-state device manufacturing, semiconductor devices, etc., to achieve excellent performance, low operating temperature, and convenient process preparation

Pending Publication Date: 2022-01-11
SOUTH CHINA NORMAL UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although studies on simulating brain functions have been carried out on a single artificial synaptic device, it is still challenging to realize a synaptic device with excellent performance and low energy consumption, low cost and flexibility, and thus has received increasing attention in the scientific community.

Method used

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  • Low-voltage driving ink-jet printing flexible synaptic transistor and preparation method thereof
  • Low-voltage driving ink-jet printing flexible synaptic transistor and preparation method thereof
  • Low-voltage driving ink-jet printing flexible synaptic transistor and preparation method thereof

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Experimental program
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Effect test

preparation example Construction

[0030] The preparation method of the low voltage driven inkjet printing flexible synaptic transistor comprises the following steps:

[0031] S1. Prepare the substrate: form a buffer layer on the surface of the flexible substrate to make a substrate for use.

[0032] S2. Prepare the bottom electrode on the substrate: deposit the bottom electrode on the substrate by DC magnetron sputtering at room temperature, and its material is copper, gold, titanium nitride, aluminum, tantalum, tungsten, tantalum nitride etc., the deposition thickness is 100-180nm.

[0033] S3. Prepare a mixed dielectric layer: dissolve the high-k precursor material in an organic solvent, then add electret material powder, mix well to obtain a mixed ink, and then use the inkjet printing process to print the mixed ink on the bottom The electrode is printed to form a film to obtain the mixed dielectric layer. The high-k precursor material is a precursor of any one of aluminum oxide, zirconium oxide and hafniu...

Embodiment 1

[0048] This embodiment prepares the synaptic transistor according to the following steps:

[0049] S1. Formation of SiO on the surface of polyimide (PI) flexible substrate x / SiN x The buffer layer is made into a substrate for later use.

[0050] S2. Deposit the bottom electrode on the substrate by DC magnetron sputtering at room temperature, and its material is any one of copper, gold, titanium nitride, aluminum, tantalum, tungsten, tantalum nitride, etc., and the deposition thickness is 100-180nm.

[0051] S31. Dissolving zirconium chloride powder in ethylene glycol methyl ether, then adding PVP powder, stirring at room temperature at a rate of 500-800 r / min for 3-5 hours to obtain a mixed ink.

[0052] S32. Take the mixed ink obtained in step S31 for viscosity and tension test, add ethylene glycol to adjust the viscosity of the mixed ink to be in the range of 1-30mPa·s, and adjust the tension of the mixed ink to be in the range of 10-70mN / m.

[0053] S33. Print the mixe...

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Abstract

The invention relates to a low-voltage driving ink-jet printing flexible synaptic transistor and a preparation method thereof, and the low-voltage driving ink-jet printing flexible synaptic transistor comprises a substrate, a bottom electrode, a mixed dielectric layer, an active layer and a top electrode which are sequentially arranged from bottom to top. The mixed dielectric layer is prepared by mixing a high-k dielectric material and an organic electret material and then carrying out an ink-jet printing process. The low-voltage driving ink-jet printing flexible synaptic transistor is beneficial to practical application in the field of low-cost and flexible artificial neuromorphic calculation.

Description

technical field [0001] The invention relates to the field of neuromorphic computing systems, in particular to a low-voltage drive inkjet printing flexible synaptic transistor and a preparation method thereof. Background technique [0002] With the rapid development of artificial intelligence, the demand for various intelligent tasks such as real-time big data analysis, motion control, visual and auditory recognition has exploded globally, although digital logic computers based on von Neumann are good at numerical calculations , but they usually require complex algorithms and consume a lot of energy and cost to perform the task, while the human brain consumes only about 20 watts of energy to perform the same task. The human brain consists of ≈10 11 neurons and ≈10 15 Composed of interconnected synapses, it is highly efficient in solving complex and unstructured problems. As the basic unit of biological brain, synapse connects pre-synaptic neurons and post-synaptic neurons,...

Claims

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Application Information

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IPC IPC(8): H01L29/786H01L29/51H01L21/288G06N3/063
CPCH01L29/786H01L29/51H01L29/517H01L21/288G06N3/063
Inventor 陶瑞强李育珊陆旭兵
Owner SOUTH CHINA NORMAL UNIVERSITY
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