Lead-free nano composite columnar array structure film with high energy storage density and wide working temperature and preparation method of lead-free nano composite columnar array structure film
A technology with wide operating temperature and high energy storage density, applied in the manufacture of hybrid/electric double layer capacitors, hybrid capacitor electrodes, hybrid capacitor electrolytes, etc., can solve the problems of increased dielectric loss, reduced energy storage efficiency, and reduced breakdown. , to achieve the effects of increasing the working temperature, increasing the breakdown field strength, and increasing the energy storage density
Patent Information
- Authority / Receiving Office
- CN · China
- Current Assignee / Owner
- Publication Date
- 2022-04-26
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Abstract
Description
technical field
[0001] The invention relates to the field of energy storage thin film materials, in particular to a lead-free nanocomposite columnar array structure thin film with high energy storage density and wide working temperature and a preparation method thereof. Background technique
[0002] With the popularization of new energy electric vehicles and the rise of clean energy such as wind power and solar power. The problem that more and more devices need to solve is the storage of energy. Due to its high power density, dielectric capacitors are widely used in many fields such as hybrid electric vehicles, electromagnetic guns, and lasers. However, compared with energy storage elements such as lithium-ion batteries, fuel cells, and supercapacitors, dielectric capacitors have a lower energy storage density, which greatly limits their wide application. In addition, the lower working temperature is also a technical bottleneck that needs to be solved urgently. The curren...
Examples
Embodiment 1
[0035] The lead-free nanocomposite columnar array film with high energy storage density and wide working temperature in this embodiment includes the following steps:
[0036] Step 1. Target preparation: for growing BaHf 0.17 Ti 0.83 o 3 -0.06HfO 2 The ceramic target material of the lead-free nanocomposite columnar array structure film adopts BaCO with a purity level of 4N 3 Powder, HfO 2 Powder and TiO 2 The powder is prepared by traditional ceramic technology according to the ratio; when preparing ceramic targets, the sintering temperature is lower than the phase formation temperature of each system by 100°C.
[0037] Step 2, put the substrate, vacuum: Nb:SrTiO 3 The substrate is placed on the heating platform, and the vacuum degree in the deposition chamber is less than 1×10 by using a mechanical pump and a molecular pump. -5 mbar.
[0038] Step 3. Ventilate and heat up: Infuse 200 mbar of argon gas and oxygen gas mixture with a volume ratio of 1 / 1, then raise the te...
Embodiment 2
[0044] The lead-free nanocomposite columnar array film with high energy storage density and wide working temperature in this embodiment includes the following steps:
[0045] Step 1. Target preparation: for growing BaHf 0.17 Ti 0.83 o 3 -0.18HfO 2 The ceramic target material of the lead-free nanocomposite columnar array structure film adopts BaCO with a purity level of 5N 3 Powder, HfO 2 Powder and TiO 2 The powder is prepared by traditional ceramic technology according to the ratio; when preparing ceramic targets, the sintering temperature is lower than the phase formation temperature of each system by 100 °C.
[0046] Step 2, put the substrate, vacuum: Nb:SrTiO 3 The substrate is placed on the heating platform, and the vacuum degree in the deposition chamber is less than 1×10 by using a mechanical pump and a molecular pump. -5 mbar.
[0047] Step 3. Ventilation and temperature rise: 200 mbar of the mixed gas of argon and oxygen with a volume ratio of 1 / 1 was introduc...
Embodiment 3
[0053] The lead-free nanocomposite columnar array film with high energy storage density and wide working temperature in this embodiment includes the following steps:
[0054] Step 1. Target preparation: for growing BaHf 0.17 Ti 0.83 o 3 -0.32HfO 2 The ceramic target material of the lead-free nanocomposite columnar array structure film adopts BaCO with a purity level of 5N 3 Powder, HfO 2 Powder and TiO 2 The powder is prepared by traditional ceramic technology according to the ratio; when preparing ceramic targets, the sintering temperature is lower than the phase formation temperature of each system by 100 °C.
[0055] Step 2, put the substrate, vacuum: Nb:SrTiO 3 The substrate is placed on the heating platform, and the vacuum degree in the deposition chamber is less than 1×10 by using a mechanical pump and a molecular pump. -5 mbar.
[0056] Step 3. Ventilate and heat up: inject 200 mbar of argon-oxygen mixed gas with a volume ratio of 1 / 1, then raise the temperature...