Torque mirror driver of micro electromechanical system, producing method and use

A technology of micro-electro-mechanical systems and manufacturing methods, applied in the direction of generators/motors, relays, electromagnetic relays, etc., can solve the problems of increasing the difficulty of manufacturing processes, large polarization-related losses, and increased power consumption of devices, achieving high reliability, Effect of low optical insertion loss and low driving voltage

Inactive Publication Date: 2006-10-11
QST CORP
View PDF2 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This kind of reflective optical attenuator needs to be made into a reflective film that changes linearly or a movable reflector whose reflective area changes linearly, which increases the difficulty of the manufacturing process, and the reflective optical attenuator and light-blocking attenuator that mo

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Torque mirror driver of micro electromechanical system, producing method and use
  • Torque mirror driver of micro electromechanical system, producing method and use
  • Torque mirror driver of micro electromechanical system, producing method and use

Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0033] In the following, the manufacturing process steps of the MEMS torsion mirror provided by the present invention are further explained in conjunction with the accompanying drawings to describe the specific structure of the torsion mirror driver provided by the present invention and its application as a tunable optical attenuator.

[0034] The specific implementation steps of the present invention are as follows:

[0035] 1. Grow a layer of silicon dioxide film with a thickness of about 1000 angstroms to 5000 angstroms on the upper and back surfaces of the silicon wafer. Such as Figure 4 (b) Shown.

[0036] 2. Use the photolithography, development and silicon dioxide etching processes in MEMS technology to produce the required patterns on the silicon dioxide film. Such as Figure 4 (c) Shown.

[0037]3. Put the silicon wafer into a potassium hydroxide solution or TMAH solution with a solution concentration of 40% and a temperature of 40°C. The pattern on the back of the silic...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention relates to a micro-electromechanical system torsion mirror driver, a manufacturing method and an application. It is characterized in that the twisted micro-mirror is located in the isolation space formed by the upper electrode and the lower electrode, and its twisted angle is adjusted according to the voltage applied by the upper electrode and the lower electrode of the driver. The production method is to first create a space between the upper electrode and the lower electrode of the twisted mirror on the back of the silicon wafer to form the twisted space of the twisted mirror, then make the lower electrode of aluminum on the glass, and then align the back of the silicon wafer with the glass Bonding together, thinning the bonded silicon-glass bonding sheet, and finally making thin beams fixed at both ends of the torsion mirror, the upper electrode of the driver and the torsion micro-mirror on the thinned silicon layer After the silicon chip is diced, a single electrostatic mirror-driven driver is obtained; it has the advantages of small size, simple process, low driving voltage, high reliability, fast response speed and integration.

Description

technical field [0001] The invention relates to a micro-electromechanical system torsion mirror driver, a manufacturing method and an application thereof, and belongs to the field of optical fiber communication. Background technique [0002] With the development of optical fiber communication, the promotion and popularization of optical fiber transmission system and optical fiber network, a large number of optical communication devices will be required, among which the variable optical attenuator is a core device in modern broadband optical network, which can be In DWDM Fiber Optical Networks (DWDM Fiber Optical Networks), the strength adjustment of each channel signal can also be used to simulate long-distance optical fiber transmission or detect the dynamic range of the transmission system. [0003] MEMS Micro-Electro-Mechanical Systems (Micro-Electro Mechanical Systems, referred to as "MEMS"), also known as microsystems, is inspired by microelectronics technology and deve...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): B81B5/00B81C1/00G02F1/19G02B6/26
Inventor 李四华吴亚明
Owner QST CORP
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap