Torque mirror driver of micro electromechanical system, producing method and use
A technology of micro-electro-mechanical systems and manufacturing methods, applied in the direction of generators/motors, relays, electromagnetic relays, etc., can solve the problems of increasing the difficulty of manufacturing processes, large polarization-related losses, and increased power consumption of devices, achieving high reliability, Effect of low optical insertion loss and low driving voltage
Inactive Publication Date: 2006-10-11
QST CORP
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The invention relates to a micro-electromechanical system torsion mirror driver, a manufacturing method and an application. It is characterized in that the twisted micro-mirror is located in the isolation space formed by the upper electrode and the lower electrode, and its twisted angle is adjusted according to the voltage applied by the upper electrode and the lower electrode of the driver. The production method is to first create a space between the upper electrode and the lower electrode of the twisted mirror on the back of the silicon wafer to form the twisted space of the twisted mirror, then make the lower electrode of aluminum on the glass, and then align the back of the silicon wafer with the glass Bonding together, thinning the bonded silicon-glass bonding sheet, and finally making thin beams fixed at both ends of the torsion mirror, the upper electrode of the driver and the torsion micro-mirror on the thinned silicon layer After the silicon chip is diced, a single electrostatic mirror-driven driver is obtained; it has the advantages of small size, simple process, low driving voltage, high reliability, fast response speed and integration.
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