Torque mirror driver of micro electromechanical system, producing method and use

Abstract

The invention relates to a micro-electromechanical system torsion mirror driver, a manufacturing method and an application. It is characterized in that the twisted micro-mirror is located in the isolation space formed by the upper electrode and the lower electrode, and its twisted angle is adjusted according to the voltage applied by the upper electrode and the lower electrode of the driver. The production method is to first create a space between the upper electrode and the lower electrode of the twisted mirror on the back of the silicon wafer to form the twisted space of the twisted mirror, then make the lower electrode of aluminum on the glass, and then align the back of the silicon wafer with the glass Bonding together, thinning the bonded silicon-glass bonding sheet, and finally making thin beams fixed at both ends of the torsion mirror, the upper electrode of the driver and the torsion micro-mirror on the thinned silicon layer After the silicon chip is diced, a single electrostatic mirror-driven driver is obtained; it has the advantages of small size, simple process, low driving voltage, high reliability, fast response speed and integration.

Description

technical field [0001] The invention relates to a micro-electromechanical system torsion mirror driver, a manufacturing method and an application thereof, and belongs to the field of optical fiber communication. Background technique [0002] With the development of optical fiber communication, the promotion and popularization of optical fiber transmission system and optical fiber network, a large number of optical communication devices will be required, among which the variable optical attenuator is a core device in modern broadband optical network, which can be In DWDM Fiber Optical Networks (DWDM Fiber Optical Networks), the strength adjustment of each channel signal can also be used to simulate long-distance optical fiber transmission or detect the dynamic range of the transmission system. [0003] MEMS Micro-Electro-Mechanical Systems (Micro-Electro Mechanical Systems, referred to as "MEMS"), also known as microsystems, is inspired by microelectronics technology and deve...

AI Technical Summary

Problems solved by technology

This kind of reflective optical attenuator needs to be made into a reflective film that changes linearly or a movable reflector whose reflective area changes linearly, which increases the difficulty of the manufacturing process, and the reflective optical attenuator and light-blocking attenuator that move this reflective mirror to attenuate Similar to the device, it may lead to excessive polarization-dependent loss, and the movable mirror of this design needs to move a large distance, which directly leads to an excessively high operating voltage, thereby increasing the power consumption of the device

Images