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Bending cantilever beam executor and its making process

A technology of cantilever beams and actuators, applied in piezoelectric devices/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, electrical components, etc., can solve the problem of high driving voltage, high cost, complex structure, etc. problems, to achieve the effect of strong adaptability, low driving voltage, and reduced energy consumption

Inactive Publication Date: 2002-10-16
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The literature (W.H.Juan, S.W.Pang. "High-aspect-ratio Si vertical micromirror arrays for optical switching." Journal of Microelectromechanical System, 1998, 7(2): 207~213) relates to a comb-shaped actuator whose output The displacement is only tens of microns, and the output displacement direction must be parallel to the plane where the comb structure is located, and the structure is complex and the cost is high; literature (Shi-Sheng Lee, Long-SunHuang. "Free-space fiber-optic switches based on MEMS Vertical Torsion Mirrors"Journal of Lightwave technology.Vol.17, NO.1, 1999, pp.7-13) discloses a torsional structure actuator with high driving voltage, and at least hundreds of volts are required to achieve a displacement of more than ten microns, and Motion position accuracy is difficult to control

Method used

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  • Bending cantilever beam executor and its making process
  • Bending cantilever beam executor and its making process
  • Bending cantilever beam executor and its making process

Examples

Experimental program
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Effect test

Embodiment 1

[0030] The present invention proposes a structure and manufacturing method of a curved cantilever beam actuator, and its embodiment 1 is characterized in that:

[0031] 1) heavily doping boron on the silicon wafer as the lower electrode;

[0032] 2) Depositing silicon dioxide and silicon nitride as an insulating dielectric film;

[0033] 3) Deposit a layer of phosphosilicate glass by low-pressure chemical vapor phase (LPCVD), photolithography and corrosion to form a concave column pattern for preventing the composite microbeam from adhering to the silicon substrate, and then pattern the phosphosilicate glass as a sacrificial layer ;

[0034] 4) Deposit a layer of polysilicon by low-pressure chemical vapor phase method (LPCVD), control the deposition conditions and annealing temperature process parameters, so that the polysilicon has a residual stress of -100Mpa; photolithography, etching, and cantilever beam structure;

[0035] 5) A layer of silicon nitride is deposited by l...

Embodiment 2

[0040] The present invention proposes a structure and manufacturing method of a curved cantilever beam actuator, and its embodiment 2 is characterized in that:

[0041] 1) heavily doping boron on the silicon wafer as the lower electrode;

[0042] 2) Depositing silicon dioxide and silicon nitride as an insulating dielectric film;

[0043] 3) Depositing a layer of phosphosilicate glass as a sacrificial layer by low-pressure chemical vapor method (LPCVD), photolithography and etching to form a concave column pattern for preventing the composite microbeam from adhering to the silicon substrate;

[0044] 4) Deposit a layer of polysilicon by low-pressure chemical vapor phase (LPCVD), control the deposition conditions and annealing temperature process parameters, so that the polysilicon has a residual tensile stress of 50Mpa; photolithography, etching, and cantilever beam structure;

[0045] 5) A layer of silicon nitride is deposited by low-pressure chemical vapor phase (LPCVD), and t...

Embodiment 3

[0050] Figure 4a , Figure 4b It shows a schematic diagram of using the present invention to drive an optical switch to realize optical path switching, wherein 12 is an optical fiber groove; 8, 13 are incident optical fibers; 10, 11 are outgoing optical fibers; 9 is a micromirror. Wherein, the micromirror 9 is vertically fabricated on the surface of the curved cantilever beam, the optical fiber 8 and the optical fiber 11 are on a straight line, the optical fiber 10 and the optical fiber 13 are on the same straight line, and the four optical fibers all form 45° with the surface of the micromirror 9.

[0051] Figure 4a When no voltage is applied between the upper and lower electrodes, the curved cantilever beam and the micromirror 9 are lifted away from the silicon substrate, the distance between the free end and the silicon substrate is 220 μm, the micromirror 9 is not in the optical path, and the light is transmitted from the optical fiber 8 to the optical fiber 11, From f...

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Abstract

The present invention relates to miniature electronic machinery system technology. The bending cantilever beam executor consists of monocrystal silicon substrate, lower pole made on the silicon substrate, press-soldered lower pole block, upper pole, press-soldered upper pole block, silica and insulating SiN layer between the two poles, and features the upper pole, which is one bending cantilever composite micro polysilicon-SiN beam in PSG sacrificial layer on the substrate. The making process is also provided, which includes making deposited polysilicon possess less residual stress and makingdeposited SiN possess relatively higher residual stress by controlling the technological condition so as to make the composite micro beam upwarp.

Description

technical field [0001] The invention belongs to the technical field of micro-electromechanical systems (MEMS), and in particular relates to a structure and a manufacturing method of a curved cantilever beam actuator with low driving voltage and large output displacement. Background technique [0002] Electrostatically driven actuators have good scale effects, high energy density and are easy to fabricate, so they are widely used in microelectromechanical systems (MEMS). Currently, most actuators use comb-like or torsional structures, both of which have limitations. The literature (W.H.Juan, S.W.Pang. "High-aspect-ratio Si vertical micromirror arrays for optical switching." Journal of Microelectromechanical System, 1998, 7(2): 207~213) relates to a comb-shaped actuator whose output The displacement is only tens of microns, and the output displacement direction must be parallel to the plane where the comb structure is located, and the structure is complex and the cost is high...

Claims

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Application Information

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IPC IPC(8): B81B3/00
Inventor 叶雄英刘素艳卜敏强周兆英
Owner TSINGHUA UNIV
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