Magnetically controlled sputtering process of making printed circuit board
Patent Information
- Authority / Receiving Office
- CN · China
- Current Assignee / Owner
- 曹波
- Publication Date
- 2004-09-08
- Estimated Expiration
- Not applicable · inactive patent
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Abstract
Description
technical field
[0001] The invention relates to a method for manufacturing a printed circuit board, in particular to a process method for manufacturing a printed circuit board by using a magnetron sputtering method. Background technique
[0002] With the miniaturization, high-speed and digitalization of electronic products, PCB products must also develop in the direction of ultra-thin, high-density and miniaturization. High density refers to increasing the component loading and wiring density per unit area of printed circuit boards. The measures taken are thin lines, small holes and multiple layers of circuit boards. The width and spacing of wires tend to be less than 0.1mm (such as 3mil line width and line spacing), and the via hole diameter is less than φ0.2mm. Multilayer boards with more than 10 layers will be used in large quantities, and there will be a large number of blind holes and buried holes, and hole metallization Etching and etching are two key steps in the p...