The invention belongs to the technical field of
high heat conduction media, and discloses a method for manufacturing a long-term efficient anti-reflection micro-nano structure on a
copper surface. The method comprises the following steps:
polishing red
copper and / or a
copper elementary substance sample; placing the polished sample on a
laser processing platform, performing preset path scanning on the sample by using pulse
laser to obtain a sample surface with a micro-nano
composite structure, and packaging the sample into a vacuum bag; and placing the obtained sample in a sample furnace of magnetron
sputtering equipment, and growing a layer of
silicon dioxide protective film on the surface of the micro-nano structure to obtain the long-term efficient anti-reflection micro-nano structure. According to the method, the micro-nano structure with the anti-reflection characteristic is prepared on the copper surface, and then a layer of
inert film is grown on the surface of the micro-nano structure for protection through a
film coating method, so that the micro-nano structure has the long-term efficient anti-
reflection function characteristic; and the thickness of the
silicon dioxide
protection layer is flexibly controlled by controlling the
coating time of magnetron
sputtering, the strength performance of the
protection layer is improved, and the problem of failure of the anti-reflection structure on the copper surface is effectively solved.