Electrochemical combined deposition method for preparing structure of composite membrane of Nano carbon tube - metal

A carbon nanotube film and carbon nanotube technology, applied in the field of preparation of nanomaterials technology, can solve problems such as high temperature and substrate limitations, and achieve the effects of flexible thickness control, simple equipment process and strong controllability

Inactive Publication Date: 2007-07-25
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In this technology, the bonding force and conductivity of the film are solved by high-temperature sintering, which obviously introduces the problems of high temperature and substrate limitations.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0016] 1. Get diameter 40-60nm, length is 5-10um, 10mg of multi-walled carbon nanotubes after purification, shearing, dispersion treatment, magnesium nitrate 5mg, dehydrated alcohol 1266ml are mixed with carbon tube electrophoresis solution, then this The solution was ultrasonicated for 60 minutes to form a well-dispersed suspension solution.

[0017] 2. Use a conductive metal sheet or an insulating substrate deposited with a conductive metal film as the deposition base material and the cathode during electrophoretic deposition, and use a stainless steel sheet as the electrophoretic anode. Put the two electrodes into a container filled with electrophoretic solution, the distance between the two electrodes is 4cm, apply a DC voltage of 20V at both ends of the electrodes, and the electrophoresis time is 10 minutes.

[0018] 3. After taking out the above electrophoresis sample and drying it, put it into the acidic copper electroplating solution, still use the deposition substrate...

Embodiment 2

[0021] 1. Take 5 mg of single-walled carbon nanotubes with a diameter of 1-2 nm and a length of 5-10 um after purification, shearing, and dispersion treatment, 3 mg of magnesium nitrate, and 1266 ml of absolute ethanol to prepare a carbon tube electrophoresis solution, and then the solution Sonicate for 60 minutes to form a well-dispersed suspension solution.

[0022] 2. Using a silicon wafer as the base material, sputtering and depositing Ti on the surface as a metal conductive layer, and forming a Ti pattern structure by photolithography and etching.

[0023] 3. The above-mentioned micro-pattern substrate is used as the electrophoretic cathode, and the stainless steel sheet is used as the anode, and the two electrodes are placed in a container filled with electrophoretic liquid. The distance between the two electrodes is 4cm, and a DC voltage of 40V is applied at both ends of the electrodes. The electrophoresis time is 6 minutes.

[0024] 4. After the above electrophoresis s...

Embodiment 3

[0027] 1. Take 5mg of multi-walled carbon nanotubes with a diameter of 40-60nm and a length of 5-10um after purification, shearing and dispersion treatment, 5mg of magnesium nitrate, and 1250ml of acetone to prepare a carbon tube electrophoresis solution, and then sonicate the solution After 60 minutes, a well-dispersed suspension solution was formed.

[0028] 2. Glass flakes are used as the deposition base material, and Cu / Ti is deposited on the surface as the metal conductive layer by sputtering. Spin-coat polyimide on the deposition substrate as a pattern mask material, and form a microstructure mask pattern after photolithography and development.

[0029] 3. The above-mentioned micro-pattern substrate is used as the electrophoretic cathode, and the stainless steel sheet is used as the anode, and the two electrodes are placed in a container filled with electrophoretic liquid. The distance between the two electrodes is 4 cm, and a DC voltage of 80V is applied to both ends of...

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PUM

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Abstract

This invention discloses a method for preparing carbon nanotube-metal composite film structure by electrochemical-combined deposition. The method comprises: preparing electrophorectic solution of stably dispersed carbon nanotubes after purification, shearing and dispersion, applying a voltage onto the electrodes to deposit a uniform layer of carbon nanotube film onto the substrate, placing the film in the electroplating solution, and forming a metal conductive film within the intertube microstructure by electrochemical method. The electrophorectic solution comprises carbon nanotubes, electrophorectic dispersing agent and charge auxiliary salt for charge decoration. This invention reduces the contact resistance between metal and carbon nanotubes, thus can fulfill the excellent electricity and heat conductivity of carbon nanotubes, and can improve the bonding strength of carbon nanotubes and conductive substrate. This invention has good compatibility with fine processing, and has such advantages as simple process, large scale preparation, controllable operation, and high efficiency, and low cost.

Description

technical field [0001] The invention relates to a preparation method in the technical field of nanomaterials, in particular to a method for preparing a carbon nanotube-metal composite film structure by electrochemical combined deposition. Background technique [0002] Carbon nanotubes have excellent electrical properties, especially in enhancing electrical and thermal conductivity. Therefore, they have important and extensive application prospects in the application of high-performance electronic devices. However, since carbon nanotubes are quasi-one-dimensional nanostructures, they have high surface energy and are not easy to disperse. Special preparation methods are required to combine them with existing device materials and processes, so as to realize Apply effectively. In the application of many electronic devices, carbon nanotubes need to be formed into a certain thin film or microstructure, but no effective and reliable preparation technology has been formed yet, so r...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C25D15/02
Inventor 张亚非徐东刘萍吴嘉浩
Owner SHANGHAI JIAO TONG UNIV
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