Shaping circular light three differential confocal microscope
A differential confocal and ring light technology, applied in the direction of microscopes, optics, optical components, etc., can solve problems such as side lobe increase, ambient temperature drift, and nonlinear error increase of axial response curve, so as to improve lateral resolution ability, extended axial range, and improved tomographic accuracy
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[0032]The technical principle of the present invention is: adopting three-differential confocal microscopy imaging technology to arrange the confocal microscope receiving optical path into three-way detection optical paths of far focus, focal plane and near focus, and the three-way intensity with different phases detected by the three-way detection system The pairwise differential subtraction of response signals achieves the purpose of improving the axial resolution and improving the anti-interference ability; in addition, by increasing the proportion of high-frequency light in the laser beam irradiation system, the three-differential confocal microscopy system Airy spot The lobe becomes smaller, so as to improve the spatial resolution of the confocal microscopy system, and merge the lateral super-resolution characteristics of the shaped ring light with the axial high-resolution characteristics of the differential confocal microscopy technology, so as to achieve a high-quality-to-...
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