Combustion chamber structure of waste gas treating system

A technology of waste gas treatment and combustion chamber, which is applied in the direction of combustion chamber, combustion method, combustion type, etc., can solve the problems of corrosion and fracture of heating rod, corrosion of combustion chamber, corrosion and peeling of the surface layer of combustion chamber, etc., and achieve the effect of preventing corrosion

Inactive Publication Date: 2005-07-27
真一(上海)集成电路设备有限公司
View PDF0 Cites 1 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] In order to solve the problem that the combustion chamber in the existing exhaust gas treatment system is corroded by harmful and toxic gas, the harmful and toxic gas will corrode its inner wall and heating rod after entering, which will cause its heating rod to corrode and break, and the surface layer of the combustion chamber will corrode and fall off , the inner layer becomes thinner, and the perforation is broken, which will affect the service life and air tightness of the combustion chamber, causing serious consequences

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Combustion chamber structure of waste gas treating system

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0018] A zirconia composite coating is added to the inner wall of the combustion chamber. The coating has strong corrosion resistance, high temperature resistance and erosion resistance.

[0019] kind

[0020] Zirconium silicate and zircon powder composite coating is used on the inner wall of the combustion chamber. This composite coating has a high melting point, high temperature resistance, and strong corrosion resistance. Some exhaust gases and harmful gases enter the combustion chamber. It can resist corrosion at the same time , to effectively treat these gases so that the discharged gases meet environmental protection standards.

Embodiment 2

[0022] Aluminum oxide or aluminum oxide composite coating 1 is added to the inner wall of the combustion chamber. The coating has strong corrosion resistance, high temperature resistance, stable high temperature chemical properties, wear resistance and erosion resistance.

[0023] chemical composition(%)

[0024] A composite coating of alumina and zirconia is used on the inner wall of the combustion chamber. Both alumina and zirconia are ceramics. Alumina has high temperature resistance, high strength, wear resistance, and corrosion resistance. Zirconia has high density and relatively high hardness. High, flexural strength and fracture toughness are the highest performance among all kinds of ceramics. The composite coating of the two has high melting point, high temperature resistance and strong corrosion resistance. Some waste gas and harmful gas enter the combustion chamber, it can be in While resisting corrosion, these gases are effectively treated to make the dis...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
thicknessaaaaaaaaaa
Login to view more

Abstract

This invention is a structure of firebox in a waste gas treating system. The structure includes firebox, heating rod and protection jacket of heating rod. Its characteristics are: there is a coating on the internal wall of firebox, this coating is one of zirconium oxide complex, alumina and alumina complex coating. The material of protection jacket of heating rod is alumina ceramics. This invention is tolerant not only to the corrosion of poisoning gas, but also to the high temperature, can safely treat waste gases and poisoning gas with high efficiency, makes the discharging gas meet the regulations of environment protection.

Description

1. Technical field: [0001] The invention relates to a treatment device for waste gas and harmful poisonous gas, and discloses a combustion chamber structure of a waste gas treatment system. Exhaust gas and harmful toxic gas are produced in the raw materials and by-products of semiconductor manufacturing process. These gases can be processed by burning in the combustion chamber, so that the discharged gas can meet the environmental protection emission standard. 2. Background technology: [0002] A variety of waste gases and hazardous toxic gases are produced in the processing of semiconductor process raw materials and by-products. Some of these hazardous substances may corrode the combustion chamber. Therefore, these hazardous and toxic gases cannot be directly discharged into the atmosphere, so it will involve A method and device for treating these exhaust gases and hazardous toxic gases. [0003] The general processing methods are: [0004] (1) Electric hot water washing ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Applications(China)
IPC IPC(8): F23G5/44F23G5/48F23G7/06F23M5/00
Inventor 周鸿淇
Owner 真一(上海)集成电路设备有限公司
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap