Method for producing components and parts made of aluminium nitride ceramics in high thermal conductivity and high dimensional accuracy

Abstract

The present invention provides an aluminium nitride ceramic compnoent with high heat conductivity and high size accuracy and its preparation method. Said method includes the following steps: uniformly mixing aluminium nitride AlN powder and yttrium oxide Y2O3 powder according to mixing ratio of 90-98:2:10, adding binding agent, mixing them into uniform feeding material, the volume ratio of powder in the feeding material is 54-68%, injection moulding, injection temperature is 120-170 deg.C and injection pressure is 80-140 MPa, after the injected blank body is grease-removed and presintered, sintering in the flowing nitrogen gas atmosphere in the sintering furnace with 1700-2000 deg.C, heat-insulating for 1-10 hr, so as to obtain the aluminium nitride ceramic component.

Description

technical field

[0001] The invention belongs to the technical field of injection molding, and in particular provides a method for preparing aluminum nitride ceramic parts with high thermal conductivity and high dimensional precision. Background technique

[0002] Aluminum nitride ceramics have high thermal conductivity, low dielectric constant and dielectric loss, reliable electrical insulation, high temperature resistance, corrosion resistance, non-toxicity, good mechanical properties, and a thermal expansion coefficient that matches silicon. The series of excellent properties can be applied not only as functional ceramic materials (such as substrates and packaging materials of integrated circuits), but also as structural materials (such as components used in high temperature and corrosive environments). Aluminum nitride ceramics have become one of the research hotspots in the field of modern new materials.

[0003] There are many forming processes for aluminum nitride cer...