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Production of dual electromagnetic shielding screen by sputtering method

A shielding film, double technology, applied in the field of sputtering preparation of electromagnetic double shielding film, can solve the problems of low production efficiency of magnetic shielding film, hindering the application of magnetron sputtering, unsuitable for industrial production of magnetron sputtering, etc., and achieve good The effect of weather resistance

Inactive Publication Date: 2006-08-16
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In short, plastic metallization by magnetron sputtering is the mainstream technology for coating electromagnetic shielding films; however, the production efficiency of magnetic shielding films prepared by sputtering is very low, which is not suitable for industrial production of magnetron sputtering, which seriously hinders the development of magnetron sputtering. Application of Injection in Plastic Metallization

Method used

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Examples

Experimental program
Comparison scheme
Effect test

preparation example Construction

[0009] The preparation process of the electromagnetic double shielding film of the present invention is as follows: selecting a nickel-chromium stainless steel target material with austenite structure of a specific composition-cleaning and activating the plastic surface-metallized sputtering plating.

[0010] Process steps are further described below:

[0011] (1) The composition of the selected target material is austenite, and its chromium and nickel equivalent positions are very close to the ferrite region, and it contains more elements that form ferrite and have a large sputtering yield, and contain less elements that form austenite and sputtering elements with small output, after the ingredients are prepared, melt casting and annealing, and form an austenitic stainless steel target; you can also choose the ready-made national standard model of stainless steel that meets the above composition requirements, and machine it into stainless steel target;

[0012] (2) Plastic s...

Embodiment

[0016] (1) Select the stainless steel plate of the national standard model 1Crl8Ni9Ti, and wire-cut it into a stainless steel target;

[0017] (2) Cleaning of the plastic surface: Put the plastic parts to be plated in the cleaning solution, and after ultrasonic cleaning for 20 minutes, take them out and dry them, put the plastic covered with a certain mask on the planetary plate holder of the vacuum coating device, and install the stainless steel target , evacuated to a local vacuum of 5×10 -3 After Pa, fill in argon gas to a vacuum degree of 0.5 Pa, and stabilize at this vacuum degree, turn on the radio frequency power supply, generate plasma through the radio frequency coil discharge in the vacuum chamber, and activate the plastic surface to improve the bonding of the metallized film behind After 10 minutes, turn off the RF power supply, and the plasma surface activation is over;

[0018] The plastic part is made of one of ABS, ABS+PC, PC or PC+glass fiber.

[0019] (3) Me...

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Abstract

The invention is about the splutter method to produce the electromagnetism double screened film. The process is: select the austenitic nichrome corrosion resistant target material- wash the surface and activate-metallized sputtered plating; the diameter of austenitic nichrome corrosion resistant target material is 60mm and the equivalent of chrome and the nickel is 18,7. The austenitic has the fast spluttered film forming speed because it is the paramagnetic body. So the film has the function of the magnetic screen and the electric shielding.

Description

technical field [0001] The invention belongs to the technical field of novel anti-electromagnetic interference (EMI) shielding, and in particular relates to a sputtering preparation method of an electromagnetic double shielding film. Background technique [0002] With the development of electronic systems towards thinner and miniaturization, most electronic system boxes now use plastic boxes. Plastic has the advantages of good plasticity, mass production in a short period of time, and insulation. However, the anti-EMI effect of plastic is poor. It is necessary to coat a layer of material with high conductivity or high magnetic permeability on a certain area of ​​the plastic surface after molding to achieve electromagnetic The effect of shielding, such as mobile phones, PDAs, laptops, set-top boxes, etc. of digital products, they must be coated with anti-EMI film material on the inner surface of the plastic box, that is, to metallize the plastic, which is the current high-fre...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34C23C14/20C23C14/02C23C14/54
Inventor 董树荣王德苗任高潮
Owner ZHEJIANG UNIV