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Big area laser modeling method and device for bionic periodic micro/nano structure surface

A technology of micro-nano structure and large area, applied in lasers, laser welding equipment, laser parts and other directions, can solve the problems of difficult process control, complex processing system, low quality of processed surface, etc., to achieve simple structure and high processing quality. , the effect of low cost

Inactive Publication Date: 2007-03-14
JIANGSU UNIV
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  • Application Information

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Problems solved by technology

[0006] The purpose of the present invention is to propose a new method and related device for making a bionic periodic micro-nano structure surface, which is superior to traditional laser etching technology, and is based on Nd:YAG Q-switched nanosecond pulse laser to generate photothermal effect on the material surface And the subsequent energy diffusion can effectively overcome the shortcomings of other micro-nano optical manufacturing methods, such as relatively complex processing systems, difficult process control, and low surface quality.

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  • Big area laser modeling method and device for bionic periodic micro/nano structure surface
  • Big area laser modeling method and device for bionic periodic micro/nano structure surface
  • Big area laser modeling method and device for bionic periodic micro/nano structure surface

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Embodiment Construction

[0017] Fig. 1 shows the schematic diagram of the nanosecond pulse laser modeling system on the surface of the bionic periodic micro-nano structure in the water medium proposed by the present invention, and the details and implementation of its specific device are described as follows:

[0018] The nanosecond pulse laser modeling system when using water medium is mainly composed of laser light source, external optical path system and sample control system in sequence. The laser light source adopts the double frequency output (wavelength 532nm) or triple frequency output (wavelength 355nm) of Nd:YAG Q-switched nanosecond pulse laser 1, and uses its two light output modes of continuous pulse emission and single pulse emission to realize Surface line scan and point scan. The external optical path system is mainly composed of a filter 3, a total reflection mirror 5, and a focusing mirror 6. The laser beam output by the Nd:YAG Q-switched nanosecond pulse laser passes through the fil...

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Abstract

The invention relates to the micron-nano processing and laser forming technology field. Wherein, the laser beam from Nd:YAG tuning-Q nano-second pulse laser crosses a filter and electronic light shutter to focus by a focusing lens and act directly on sample surface; the computer control system controls the shutter on-off for light path switching and applies a driver to control horizontal micro-displacement of 3D drive platform. This invention is simple and low cost, has super processing quality and efficiency.

Description

technical field [0001] The invention belongs to the technical field of micro-nano processing and laser forming, and in particular refers to a large-area laser modeling method and device for a bionic periodical micro-nano structure surface. Background technique [0002] Experiments and applied research on laser micro-nano processing have a long history, and the most successful application is in the field of microelectronics developed in the second half of the 20th century. So far, micro-nano laser manufacturing and related technologies have become the main focus of current international competition. field. Laser etching technology in laser micro-nano processing technology was first proposed for excimer laser processing technology in the 1980s. It uses high-energy pulsed laser beams to scan the surface of materials to obtain tiny grooves with a certain width and depth. Improves the wetting properties of material surfaces. Because of its characteristics of non-contact, no pol...

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Application Information

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IPC IPC(8): G02F1/35H01S3/00B23K26/06B23K26/08B23K26/12B23K26/36B23K26/064B23K26/082
Inventor 周明李保家蔡兰
Owner JIANGSU UNIV