Metal nitride and method for producing metal nitride
A manufacturing method and technology of nitrides, applied in nitrogen compounds, nitrogen-metal/silicon/boron binary compounds, chemical instruments and methods, etc., can solve gallium nitride lattice defects, difficult to obtain high-quality, h-GaN Purity reduction and other problems, to achieve high yield, eliminate the mixing of oxygen, and avoid the effect of residual
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Embodiment 1
[0089] The 6N metal gallium of 1.50g is loaded into the vessel (volume is 13cm 3 ). At this time, the ratio of the volume of the raw material metal to the volume of the container is 0.05 or less; the ratio of the area of the bottom and wall of the container contacting the raw material metal to the total area of the bottom and wall of the container is 0.05 or less. In addition, at this time, the metal gallium filled in the vessel can contact the gas with an area of 1 cm 2 / g or more. Quickly install the container in the center of a container consisting of a horizontally placed cylindrical quartz tube with an inner diameter of 32mm and a length of 700mm, circulate high-purity nitrogen (5N) at a flow rate of 200Nml / min, and clean the inside of the container and the piping components Replace fully.
[0090] Then, while passing high-purity (5N) nitrogen at 50Nml / min, use the equipped heater to raise the temperature to 300°C, and change the nitrogen gas to a mixture of 5N a...
Embodiment 2
[0094] Fill 4.00g of 6N gallium metal into a cylindrical vessel made of pBN with a length of 100mm and a diameter of 30mm (volume is 70cm 3 ). At this time, the ratio of the volume of the raw material metal to the volume of the vessel is 0.02 or less; the ratio of the area of the bottom and wall of the vessel contacting the raw metal to the total area of the bottom and walls of the vessel is 0.02 or less. In addition, at this time, the metal gallium filled in the vessel can contact the gas with an area of 0.7cm 2 / g or more. Then, the flow rate of the mixed gas is set to 5N ammonia 500Nml / min and 5N nitrogen 50Nml / min; relative to the total volume of the raw material metal at this time, the volume per second of the supplied ammonia gas is more than 12 times; the raw material metal Except that the gas flow rate near the upper side was set to 1 cm / s or more, gallium nitride polycrystalline powder crushed to a size of 100 mesh or less was obtained in the same manner as in...
Embodiment 3
[0097] 2.00g of 6N gallium metal is filled into a graphite vessel (capacity of 12cm 3 ). At this time, the ratio of the volume of the raw material metal to the volume of the vessel is 0.03 or less; the ratio of the area of the bottom and wall of the vessel contacting the raw metal to the total area of the bottom and walls of the vessel is 0.03 or less. In addition, at this time, the gallium metal filled in the vessel can contact the gas with an area of 0.9 cm 2 / g or more. Then, the flow rate of the mixed gas is set to 5N ammonia 500Nml / min and 5N nitrogen 50Nml / min; relative to the total volume of the raw material metal at this time, the volume per second of the supplied ammonia gas is more than 25 times; the raw material metal Except that the gas flow rate near the upper side was set to 1 cm / s or more, gallium nitride polycrystalline powder pulverized to a size of 100 mesh or less was obtained in the same manner as in Example 1. In addition, if calculated based on t...
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