Silica glass member for hermetic sealing of ultraviolet SMD LED element and method for manufacturing quartz glass member for ultraviolet LED
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example 1
[0091](Formation of Plastic Matter)
[0092]79 Parts by weight of mixed powder obtained by mixing spherical synthetic silica powder having a diameter of 1.2 μm (product name: ADMAFINE SO-E3) and spherical synthetic silica powder having a diameter of 2 μm (product name: ADMAFINE SO-E5) at a weight ratio of 1:1, 20 parts by weight of an aqueous solution of 7.8 wt % METOLOSE (product name: SM-4000), and 1 part by weight of a lubricant (product name: UNILUBE 50 MB-2) were mixed and then kneaded with a triple roll mill to form plastic matter. The term “plastic matter” as used herein refers to a kneaded product of silica glass powder, in a state of having higher viscosity than a slurry, and having hardness and plasticity comparable to those of a clay.
[0093](Degassing Operation)
[0094]The formed plastic matter is degassed by being further kneaded under reduced pressure. Specifically, for example, kneading extrusion is performed using a kneading extrusion molding machine manufactured by Miyazak...
example 2
[0125](Molding Step)
[0126]79 Parts by weight of mixed powder obtained by mixing powder having an average particle diameter of 1.0 μm (ADMAFINE SO-E3 manufactured by Admatechs Company Limited) and powder having an average particle diameter of 2.0 μm (ADMAFINE SO-E5 manufactured by Admatechs Company Limited) at a weight ratio of 1:1, 20 parts by weight of an aqueous solution of 7.8% methylcellulose (METOLOSE SM-4000 manufactured by Shin-Etsu Chemical Co., Ltd.), and 1 part by weight of a lubricant (UNILUBE 50 MB-2 manufactured by NOF Corporation) were mixed and then kneaded with a triple roll mill. Through the use of a vacuum extrusion molding machine, the mixture was degassed, and subjected to kneading extrusion under a reduced pressure of 0.1 MPa.
[0127]The mixture of the silica powder and the binder subjected to the degassing treatment was injection-molded into a metal mold at an increased pressure of 120 MPa to provide a molded body having a predetermined shape. Here, with regard t...
example 3
[0148]A quartz glass member for an ultraviolet LED was obtained in the same manner as in Example 2 except that the treatment for repairing an oxygen-deficient defect was performed at a temperature of 1,050° C., and under an atmosphere containing water vapor produced by a method involving bubbling pure water kept at 30° C. with oxygen serving as a carrier.
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Abstract
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