Plasma descaling of titanium and titanium alloys
a technology of titanium alloys and descaling, which is applied in the field of surface treatment of metals and metallic alloys, can solve the problems of large amount of metal waste, and large amount of metal waste, and achieve the effect of cost-effectiveness and low waste of materials
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Two samples of heat-treated titanium alloy were descaled, one in SF.sub.6 and the other in CF.sub.4 plasmas. Each sample measured 0.5.times.1.5 inches and was 0.125 inches thick. Since the 6.3 liter volume plasma chamber used for descaling was only able to accept 5-inch wide wafers, each sample 10 was adhered to an upper surface of a 5-inch silicon wafer 12 with photoresist material 14 in order to lead the sample into the chamber, as illustrated in the FIGURE. Moreover, in order to provide a comparison between the descaled and original surfaces, one side of the upper surface 10a of each sample was covered with a strip of silicon 16 adhered to the face of the sample with photoresist 14 to provide a mask, while the other side 10b was exposed to the plasma.
The descaling with CF.sub.4 was carried out with a flow rate of 45 ccs per minute of CF.sub.4 through the chamber, along with 2 ccs per minute of oxygen. The plasma descaling was carried out for in periods of 30 minutes, that include...
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