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Preprocessed chip of porous silica microfluid sample

A technology for porous silica and sample pretreatment, which is used in material testing products, chemical instruments and methods, and microbial determination/inspection. Effect

Inactive Publication Date: 2009-12-02
INST OF ELECTRONICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, most of the conventional SPE methods have limited extraction efficiency due to the limitation of the specific area of ​​the solid phase carrier.

Method used

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  • Preprocessed chip of porous silica microfluid sample
  • Preprocessed chip of porous silica microfluid sample
  • Preprocessed chip of porous silica microfluid sample

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0040] Clean N-type low resistance (0.011-0.014Ω.cm) double-sided polished single crystal silicon wafer 7; grow 2000 Silicon nitride (the thickness of silicon nitride can be selected from 1000-7000 ) as etching silicon wafer 7 and the mask of preparing porous silicon oxide; Get rid of negative photoresist BN303 (negative glue), develop after exposure on the Karlsuss MA4 type photolithography machine; Use SF on the plasma etching machine 6 Remove the silicon nitride; use KOH anisotropic etching solution to etch out the flow cell 3 with a depth of 120 μm, the flow cell 3 with a depth of 120 μm (the depth can be selected as 80-150 μm), and the microchannel 1 with a width of 200 μm, Sample injection and sample discharge flow cell 3 are blind holes with opening upwards; porous silicon is prepared by electrochemical corrosion in hydrofluoric acid (HF) ethanol solution (porous silicon is dendritic or spongy, such as image 3 Shown); 550 ℃ low-temperature thermal oxidation growth p...

Embodiment 2

[0042] Clean N-type low resistance (0.011-0.014Ω.cm) double-sided polished single crystal silicon wafer 7; grow 2000 Silicon nitride (the thickness of silicon nitride can be selected from 1000-7000 ) as a mask for etching silicon wafer 7 and preparing porous silicon oxide; positive photoresist AZ1500 or AZ4620 (positive photoresist) is used as a photolithographic mask, and is developed after exposure on a Karlsuss MA4 photolithography machine; deep etching technology etching Sample inlet and outlet holes 2, sample inlet and outlet holes 2 are through holes on the monocrystalline silicon wafer; photoresist is removed with acetone; the second photolithography is developed after exposure on a Karlsuss MA4 photolithography machine; The deep etching technology etches the channel 1 with a depth of 80 μm (the depth can be selected as 80-200 μm) or the channel 1 with a depth of 80 μm (the depth can be selected as 80-200 μm) and the micro-column 6 in the channel (the gap between the ...

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Abstract

The porous silicon oxide microfluidic sample pretreatment chip of the present invention relates to a microfluidic sample pretreatment chip used for separation and purification of biological samples. Silicon wafers and glass are used as chip main materials, and microchannels are etched on the silicon wafers. Etch the sample inlet and outlet holes or the sample inlet and outlet flow cells at both ends of the microchannel, bond the glass cover plate on the silicon chip, prepare porous silicon in hydrofluoric acid ethanol solution by electrochemical corrosion method, and then A thermal oxidation method is used to prepare a porous silicon oxide layer to modify the micro channel, and the porous silicon oxide layer is used as a solid phase carrier for separation and purification. This chip has a porous silicon oxide layer prepared on the surface of the microchannel of the silicon chip, which has a larger specific surface area than the ordinary chip without a porous silicon oxide layer, increases the adsorption area of ​​the solid phase carrier, and greatly improves the separation and extraction of biological samples. efficiency.

Description

technical field [0001] The invention relates to a microfluidic sample pretreatment chip for separating and purifying biological samples, in particular to extracting biological samples such as DNA, RNA, protein or cells from various samples. Background technique [0002] Microfluidic biochip is based on micro-electromechanical system (MEMS) processing technology, combined with analytical chemistry and analytical biochemical technology, with micro-channel network as the structural feature, it can complete sample pretreatment, single-component detection, PCR amplification and DNA Multiple functions such as sequencing can realize the purpose of testing and analyzing genes, ligands, antigens and living cells, etc., and have broad application prospects in biomedicine and clinical diagnosis. The small size of the microfluidic biochip greatly reduces the consumption of reagents, shortens the reaction time, and makes high-throughput, large-scale, and real-time detection possible. At...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C12Q1/68C12Q1/04G01N33/68
CPCB01L2300/0816B01L3/502707B01L2300/0883B01L2300/088B01L2200/12B01L2300/0887
Inventor 崔大付陈兴
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI
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