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Electrochemical modification method for silicon face biology performance

A biological and silicon surface technology, applied in chemical instruments and methods, crystal growth, anodic oxidation, etc., can solve the problems of easy peeling off of the coating surface and poor biocompatibility of the coating, so as to achieve the goal of not falling off easily and improving biocompatibility sex, bonding effect

Inactive Publication Date: 2009-08-05
HUNAN UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The main purpose of the present invention is to provide a method for the electrochemical modification of the biological properties of the silicon surface, that is, a new method for the biological modification of the surface of crystalline silicon with anodic oxidation treatment as the core, to solve the problem of biological and medical problems in the past. The biocompatibility of the crystalline silicon surface coating is poor, and the formed coating surface is easy to fall off the technical problem

Method used

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  • Electrochemical modification method for silicon face biology performance
  • Electrochemical modification method for silicon face biology performance
  • Electrochemical modification method for silicon face biology performance

Examples

Experimental program
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Effect test

Embodiment 1

[0046] 1) Electrolyte solution preparation: Accurately weigh 10 grams of analytically pure sodium phosphate, dissolve it in 90 grams of deionized water to obtain alkaline electrolyte solution A, and the concentration of alkaline electrolyte solution A is 10 wt%.

[0047] 2) Anodic oxidation of silicon: Anodic oxidation of silicon: in the attached figure 1 In the anodic oxidation circuit shown, a double-electrode electrolytic system is formed with a single crystal silicon wafer with a clean surface as the anode g and graphite as the cathode i. The alkaline electrolyte solution A prepared above is used as the anodic oxidation medium h, and constant voltage and constant current electrophoresis is used. Instrument b is a DC power supply for anodizing silicon wafers, switch a controls the opening and closing of the circuit, sliding rheostat c precisely adjusts the current in the circuit, digital DC ammeter d indicates the current value flowing through the circuit, and digital DC vol...

Embodiment 2

[0051] 1) Electrolyte solution preparation: accurately weigh 600 grams of analytically pure sodium hydroxide, and dissolve it in 400 grams of distilled water to obtain alkaline electrolyte solution A, the concentration of alkaline electrolyte solution A being 60 wt%.

[0052] 2) Anodization of silicon: in the attached image 3 In the anodic oxidation circuit shown, a double-electrode electrolytic system is formed by using a polycrystalline silicon wafer with a clean surface as the anode g′ and graphite as the cathode i, and using the alkaline electrolyte solution A prepared above as the anodic oxidation medium h, using a constant voltage and constant current electrophoresis apparatus b is the direct current power supply to anodize the silicon chip, the switch a controls the opening and closing of the circuit, the sliding rheostat c precisely adjusts the current in the circuit, the digital direct current meter d indicates the current value flowing through the circuit, and the di...

Embodiment 3

[0056] 1) Preparation of electrolyte solution: preparation of electrolyte solution: accurately measure 139 grams of analytically pure hydrogen peroxide solution, which has a mass content of 36 wt%, and dissolve it in 861 grams of pure water to obtain weakly acidic electrolyte solution B and weakly acidic electrolyte solution B. The concentration is 5 wt%.

[0057] 2) Anodization of silicon: in the attached Figure 4 In the shown anodic oxidation circuit, a double-electrode electrolysis system is formed by using a single crystal silicon wafer with a clean surface as the anode g and a platinum wafer as the cathode i'. The constant current electrophoresis instrument b is a DC power supply for anodizing silicon wafers, the switch a controls the opening and closing of the circuit, the sliding rheostat c precisely adjusts the current in the circuit, and the digital DC ammeter d indicates the value of the current flowing through the circuit. The DC voltmeter e indicates the cell vol...

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Abstract

The invention discloses a method of electrochemistrically modifying the biological performance of a silicon surface. The method comprises the following steps: firstly, dissolving an alkaline reagent or a weakly acidic reagent into water to obtain an alkaline or weakly acidic electrolytic solution; then using crystal silicon as an anode (g) and conductive inert material as a cathode (i) to form a double-electrode electrolytic system, using the prepared alkaline or weakly acidic electrolytic solution as an electrolyte (h) and adopting a direct current (b) to oxidize the anode (g) of the crystal silicon; afterwards, preparing a bionic solution with a certain ingredients, soaking the crystal silicon after anode oxidization treatment at a temperature close to a physiological temperature, periodically refreshing the silicon-soaked bionic solution and drying the bionic solution to obtain an osteolith coating of a silicon-based type. The invention can be directly applied to biomedical crystal silicon material to improve the biological compatibility and the binding performance of the silicon material surface, has low cost, mild modification conditions and is convenient and controllable.

Description

technical field [0001] The invention belongs to the field of silicon surface modification, in particular to an electrochemical modification method for silicon surface biological properties. Background technique [0002] Because silicon materials have excellent semiconductor properties, fast and accurate response, high precision, easy control, and small volume, single crystal silicon and polycrystalline silicon materials have become key components in many microelectronic devices today. Microelectronic devices with silicon as the core structure It has been widely used or has potential and important application prospects in aerospace, transportation, construction, energy, environmental protection, biology, medical and other fields. [0003] In recent years, with the development of the interdisciplinary disciplines of biology and medicine, especially with the increasing requirements of people's quality of life and health, there are more new demands for high-level medical diagnos...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B33/00C25D11/32C23C28/04
Inventor 吴振军袁剑民李文生王慧任艳群周小平
Owner HUNAN UNIV
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