Monolithic integrated non-refrigerated infrared/ultraviolet double-color detector and manufacture method thereof

An uncooled infrared and two-color detector technology, which is applied in the field of photoelectric detectors, can solve the problems of bulky refrigeration systems and the difficulty of realizing low-cost portable system requirements, so as to reduce the size of devices, improve the probability of detection and identification, and reduce processing costs. cost effect
CN101586985AActive Publication Date: 2009-11-25THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
Publication Date
2009-11-25

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Abstract

The invention discloses a monolithic integrated non-refrigerated infrared / ultraviolet double-color detector and a manufacture method thereof, belonging to the field of photoelectric detectors. The detector comprises a substrate, an ultraviolet sensitive thin film structure and an infrared sensitive thin film structure thereof are integrated on the same substrate material; a cushion layer, an ultraviolet sensitive layer, an isolation layer and an infrared detecting structure are sequentially arranged on the substrate upwardly. In the invention, SiC, GaN series or AlxGa1-xN series of the broad-band gap high-temperature semiconductor ultraviolet sensitive thin film structure and ferro-electricity, vanadium oxide or amorphous silicon of the non-refrigerated infrared sensitive thin film structure grow on the same substrate, and a relative simple material growth method and processing process are adopted to realize the monolithic integration of the non-refrigerated infrared / ultraviolet double-color detector so as to develop the range of a response spectrum, and improve the detection and identification probability of a target; in the application, the invention has no requirement for low temperature, and reduces the volume of parts and the production cost.
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Description

Technical field

[0001] The invention relates to a photoelectric detector, in particular to a monolithic integrated uncooled infrared / ultraviolet two-color detector and a manufacturing method thereof. Background technique

[0002] Infrared / ultraviolet (IR / UV) dual-color detector dual-color detection technology can obtain information in both ultraviolet and infrared bands, which can enhance the ability to recognize targets and reduce the false alarm rate. It is one of the current research hotspots in the development of detection technology. Forest fire monitoring, indoor and outdoor fire protection and safety monitoring have important application prospects. The current general technical solution is to simply combine two sets of independent infrared detectors and ultraviolet detectors to form an infrared / ultraviolet dual-color detector, which is complex in packaging, large in size and high in cost; recently, a heterostructure based on GaN / AlGaN has been reported. Material system mon...

Claims

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