Method for preparing high-hardness diamond film on surface of medical CoCrMo alloy

A diamond film, high hardness technology, applied in metal material coating process, gaseous chemical plating, coating and other directions, can solve problems such as artificial joint replacement failure, achieve easy control of deposition process, improve wear resistance, and improve interface The effect of bond strength

Inactive Publication Date: 2011-02-09
CHINA UNIV OF MINING & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Technical problem: the purpose of the present invention is to provide a method for preparing a diamond-like carbon film with high hardness and high wear resistance on the surface of medical CoCrMo alloy, s...

Method used

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  • Method for preparing high-hardness diamond film on surface of medical CoCrMo alloy
  • Method for preparing high-hardness diamond film on surface of medical CoCrMo alloy
  • Method for preparing high-hardness diamond film on surface of medical CoCrMo alloy

Examples

Experimental program
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Effect test

Embodiment 1

[0024] Embodiment one: the medical CoCrMo (cobalt chromium molybdenum) alloy surface is first used 180 # , 400 # , 800 # , 1200 # Grinding with water sandpaper in turn, polishing treatment reduces the surface roughness of CoCrMo (cobalt chromium molybdenum) alloy to less than 15nm, then immerses it in alcohol solvent and ultrasonically cleans it for 10 minutes to remove the dirt on the alloy surface, and then puts it in a drying oven at 60°C Dry for 10 hours and set aside. The dried medical CoCrMo (cobalt chromium molybdenum) alloy is put into the chemical vapor deposition reaction chamber, and the reaction chamber is evacuated (pressure is lower than 10 -4 Pa), then pass into H 2 (hydrogen), control its flow rate to 60sccm, reaction pressure to 20Pa, radio frequency power to 100W, and sputter cleaning time to 5min. After the sputtering is completed, the H in the reaction chamber is pumped out 2 (hydrogen) (atmospheric pressure lower than 10 -4 Pa), SiH was introduced i...

Embodiment 2

[0026] Embodiment two: the medical CoCrMo (cobalt chromium molybdenum) alloy surface is first used 180 # , 400 # , 800 # , 1200 # Grinding with water sandpaper in turn, polishing treatment reduces the surface roughness of CoCrMo (cobalt chromium molybdenum) alloy to less than 15nm, then immerses it in alcohol solvent and ultrasonically cleans it for 15min to remove the dirt on the alloy surface, and then puts it in a drying oven at 60°C Dry for 10 hours and set aside. The dried medical CoCrMo (cobalt chromium molybdenum) alloy is put into the chemical vapor deposition reaction chamber, and the reaction chamber is evacuated (pressure is lower than 10 -4 Pa), then pass into H 2 (hydrogen), control its flow rate to 60sccm, reaction pressure to 20Pa, radio frequency power to 100W, and sputter cleaning time to 5min. After the sputtering is completed, the H in the reaction chamber is pumped out 2 (hydrogen) (atmospheric pressure lower than 10 -4 Pa), SiH was introduced into t...

Embodiment 3

[0028] Embodiment three: the medical CoCrMo (cobalt chromium molybdenum) alloy surface is first used 180 # , 400 # , 800 # , 1200 # Grinding with water sandpaper in turn, polishing treatment reduces the surface roughness of CoCrMo (cobalt chromium molybdenum) alloy to less than 15nm, then immerses it in alcohol solvent and ultrasonically cleans it for 20 minutes to remove the dirt on the alloy surface, and then puts it in a drying oven at 60°C Dry for 10 hours and set aside. The dried medical CoCrMo (cobalt chromium molybdenum) alloy is put into the chemical vapor deposition reaction chamber, and the reaction chamber is evacuated (pressure is lower than 10 -4 Pa), then pass into H 2 (hydrogen), control its flow rate to 60sccm, reaction pressure to 20Pa, radio frequency power to 100W, and sputter cleaning time to 5min. After the sputtering is completed, the H in the reaction chamber is pumped out 2 (hydrogen) (atmospheric pressure lower than 10 -4 Pa), SiH was introduced...

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Abstract

The invention discloses a method for preparing a high-hardness diamond film on the surface of medical cobalt-chrome-molybdenum (CoCrMo) alloy. The method comprises the following steps of: performing sputter-cleaning on polished and cleaned CoCrMo alloy by using hydrogen (H2) gas; depositing a silicon (Si) film transition layer on the surface of the CoCrMo alloy by taking silicane (SiH4) and hydrogen (H2) as a gas source by the conventional radio frequency plasma-enhanced chemical vapor deposition; and preparing a diamond like carbon (DLC) film on the Si film transition layer by taking methane (CH4) and hydrogen (H2) as a gas source by the conventional radio frequency plasma-enhanced chemical vapor deposition. Film bases prepared by the method are combined in a saw-toothed mode, good combination performance is represented between the film bases, and the defect of low boundary bearing capacity caused by low combination performance is overcome; meanwhile, the sp3C bond content of prepared DLC film is high, the DLC film with high hardness can be obtained and the wear resistance of the DLC film is effectively improved. In addition, the method has the advantages of simple process and low cost and has great application potential in the technical field of surface modification of a biomaterial.

Description

technical field [0001] The invention relates to a method for preparing a high-hardness diamond-like film, in particular to a method for preparing a high-hardness diamond-like film on the surface of a medical CoCrMo alloy using radio frequency plasma enhanced chemical vapor deposition technology. Background technique [0002] Cobalt-chromium-molybdenum alloy is a commonly used cobalt-based medical bioalloy due to its good corrosion resistance, wear resistance and biocompatibility, and has been widely used in the manufacture of artificial hip and knee prostheses. CoCrMo (cobalt chromium molybdenum) alloy is a solid solution formed with cobalt as the basic component, and generally contains alloying elements such as chromium and molybdenum. More chromium in the alloy can form thin and dense Cr on the surface of the alloy 2 o 3 Oxide layer, under normal conditions, this kind of stable and continuous oxide film is conducive to improving the corrosion resistance and wear resistan...

Claims

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Application Information

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IPC IPC(8): C23C16/27
Inventor 孙彦敏王庆良沈涵张绪平张磊
Owner CHINA UNIV OF MINING & TECH
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